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公开(公告)号：EP1419511B1
公开(公告)日：2006-06-28
申请号：EP02757244.5
申请日：2002-08-20
发明人： DAVIS, George , BECKA, Stephen
CPC分类号： H01H1/0036 , H01H1/20 , H01H37/46 , H01H2001/0084 , H01H2037/008
摘要： A simplified snap-action micromachined thermal switch having a bimodal thermal actuator fabricated from non-ductile materials such as silicon, glass, silicon oxide, tungsten, and other suitable materials using MEMS techniques.
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公开(公告)号：EP1419511A1
公开(公告)日：2004-05-19
申请号：EP02757244.5
申请日：2002-08-20
发明人： DAVIS, George , BECKA, Stephen
CPC分类号： H01H1/0036 , H01H1/20 , H01H37/46 , H01H2001/0084 , H01H2037/008
摘要： A simplified snap-action micromachined thermal switch having a bimodal thermal actuator fabricated from non-ductile materials such as silicon, glass, silicon oxide, tungsten, and other suitable materials using MEMS techniques.
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