Method and apparatus for detecting trace contaminants
    1.
    发明公开
    Method and apparatus for detecting trace contaminants 失效
    Verfahren und Apparat zur Detektion von Spuren von Verunreinigungen。

    公开(公告)号:EP0453225A1

    公开(公告)日:1991-10-23

    申请号:EP91303342.9

    申请日:1991-04-16

    IPC分类号: G01N27/00

    摘要: Apparatus and methods for identifying the nature of an unidentified substrate present in trace amounts of known gaseous or liquid media such as air or water include collecting a sample of the substance in the media, filtering and concentrating the sample, depositing at least a portion of the sample on a known substrate, analyzing the deposited sample utilizing SETM, NFOM and/or AFM techniques to form one or more images characteristic of the unidentified substance, and then identifying the substance by comparing the images so obtained to images of known substances obtained using the same techniques.

    摘要翻译: 用于鉴定存在于微量已知的气体或液体介质如空气或水中的未鉴定底物的性质的装置和方法包括将物质样品收集在介质中,过滤和浓缩样品,沉积至少一部分 在已知基板上进行样品分析,利用SETM,NFOM和/或AFM技术分析沉积的样品,形成一个或多个不明物质的特征图像,然后通过将所获得的图像与使用 相同的技术。