公开(公告)号：EP2881973A1

公开(公告)日：2015-06-10

申请号：EP13195583.3

申请日：2013-12-04

申请人： Institute of Solid State Physics, University of Latvia

发明人： Purans, Juris

IPC分类号： H01J37/32 ,  C23C14/52 ,  G01N23/223 ,  H05H1/00

CPC分类号： H01J37/32972 ,  C23C14/52 ,  G01N23/223 ,  G01N2223/638 ,  H01J37/32981 ,  H01J37/3405 ,  H05H1/005

摘要： The invention relates to a diagnostics of plasma and flux of sputtered or evaporated particles of material inside a chamber, which is maintained at a low pressure. There is offered a device and a method for 2D or 3D X-ray fluorescence mapping analysis of plasma and/or flux of sputtered or evaporated particles of material, where the device comprises: a probe unit placed outside or inserted into a plasma and/or a flux of sputtered or evaporated particles of material and adapted to direct signals from a signal supplying unit to a signal detecting unit; a means for processing the detected signals and interpreting the signals received, wherein the device comprises a source (2) adapted for generating plasma and/or creating a flux of sputtered or evaporated particles of material; a X-ray source (11) adapted to send a collimating beam (14) through the plasma and/or the flux of sputtered or evaporated particles; a movable X-ray fluorescence polycapillary confocal probe (5) provided with at least an x- and y- axis manipulator (6), the probe (5) comprising an X-ray optic (7), being accommodated in a casing (8); where the probe (5) is adapted to collect the XRF signal from an intersect (17) the beam (14) provided by the X-ray source (11) and projection (line of sight (16)) of the probe (5); a X-ray energy sensitive detector (4) being optically connected with the probe (5) to enable the X-ray optic (7) to direct X-rays towards the detector (4) from the optic's (7) input end facing the beam (14).

摘要翻译： 本发明涉及一种等离子体和在腔室内材料的溅射或蒸发的颗粒的磁通的诊断，所有这一切都被保持在低压力。 有可供其中所述装置包括器件和用于等离子体和/或材料制成，溅射或蒸发的颗粒的通量的二维或三维X射线荧光作图分析方法，包括：测试单元设置在外部，或者插入到血浆和/或 从供给单元于检测单元的信号的信号直接信号和材料的angepasst溅射或蒸发的粒子流; 用于处理检测到的信号和解释信号的装置接收到的，worin该装置包括一个光源（2）适于产生等离子体和/或产生材料溅射或蒸发的粒子流; 一个X射线源（11）angepasst发送通过等离子体和/或溅射或蒸发的颗粒的通量的准直光束（14）; 可移动的X射线荧光共焦多毛细管探针提供（5）与至少一个试验，以X轴和（6）中，（5）包括在X射线光学器件（7）被容纳在外壳中的y轴操纵器（8 ）; 其中样品（5）是angepasst收集从由X射线源（11）和投影在样品（视线（16线））提供在交叉（17）的光束（14）的XRF信号（5） ; 一X射线能量敏感检测器（4）被光学地与探针（5），连接到使X射线光学器件（7），以指导X射线朝向检测器（4）从所述光学部件的（7）输入端面向 梁（14）。

公开(公告)号：EP3112842A1

公开(公告)日：2017-01-04

申请号：EP15174611.2

申请日：2015-06-30

申请人： Bundesrepublik Deutschland, vertreten durch das Bundesmisterium für Wirtschaft und Energie, endvertreten durch den Präsidenten der PTB ,  Technische Universität Berlin

发明人： Nutsch, Andreas ,  Streeck, Cornelia ,  Hornemann, Andrea ,  Beckhoff, Burkhard ,  Grötzsch, Daniel ,  Malzer, Wolfgang

IPC分类号： G01N21/03 ,  G01N23/22

CPC分类号： G01N21/0317 ,  G01N13/00 ,  G01N21/0332 ,  G01N2021/0364 ,  G01N2021/335 ,  G01N2223/637 ,  G01N2223/638

摘要： Die Erfindung betrifft eine Experimentierzelle (10), die ausgebildet ist zum Verbinden mit einer Spektroskopie-Vorrichtung, zur Untersuchung von Fluiden und/oder Fluid-Grenzschichten (20), mit einem geschlossenen Probenraum (14) zum Aufnehmen eines Probe-Fluids (12), insbesondere eines Probe-Gases oder einer Probe-Flüssigkeit, und zumindest einem Fenster (18), das für elektromagnetische Strahlung durchsichtig ist. Erfindungsgemäß ist eine Druckeinstellvorrichtung (28) zum Einstellen des Drucks (p 14 ) im Probenraum (14) vorgesehen.

摘要翻译： 本发明涉及的实验电池（10），其被设计用于连接到分光装置为具有封闭样品室（14），用于接收样品流体的流体和/或流体阻挡层（20）的检查（12） ，尤其是样品气体或液体样本，和至少一个窗口（18），其是对电磁辐射透明英寸 根据本发明，用于调节在样品室中的压力（p 14）的压力调节装置（28）（14）设置。

公开(公告)号：EP3226035A1

公开(公告)日：2017-10-04

申请号：EP15862537.6

申请日：2015-06-01

申请人： Institute Of Nuclear Physics And Chemistry, China Academy of Engineering Physics

发明人： MAO, Benjiang ,  LIU, Yixin ,  XU, Yang ,  HE, Meng ,  ZHUO, Renhong ,  WEN, Dezhi ,  DING, Dajie ,  CHENG, Jing ,  ZHENG, Hui

IPC分类号： G01T1/02

CPC分类号： G01T1/02 ,  G01N23/20 ,  G01N2223/05 ,  G01N2223/638 ,  G01T7/005

摘要： The invention relates to the field of verification or calibration of radiation protection. The invention solves the problem that the on-site and in-situ verification or calibration is relatively difficult as the existing standard reference radiation field is large in spatial volume and is unable or difficult to be moved, and provides an air kerma conventional true value measuring method. The technical solution of the method can be summarized as: constructing a small-scale reference radiation field, then selecting a proper radiation source and source strength for providing incident rays for a shielding box, subsequently selecting a plurality of gamma ray dose measurement instruments as experiment samples for establishing a prediction model to obtain the prediction model of the air kerma conventional true value of a check point, finally putting a probe of an instrument to be detected at the check point, recording scattering gamma spectra measured by a gamma spectrometer, and introducing the scattering gamma spectra into the prediction model to obtain the air kerma conventional true value. The method has the beneficial effects that the result is accurate, the reference radiation field used is small in size, and is applicable to the measurement of the air kerma conventional true value.

摘要翻译： 本发明涉及辐射防护的验证或校准领域。 本发明解决了现有标准参考辐射场空间体积大，不能或难以移动的现场标定参考辐射场相对困难的问题，提供了空气比马尔传统真值测量 方法。 该方法的技术方案可以概括为：构建小尺度参考辐射场，然后选择合适的辐射源和源强度为屏蔽箱提供入射光线，随后选择多个伽马射线剂量测量仪器作为实验 用于建立预测模型的样本以获得检验点的空气比马力常规真实值的预测模型，最后在检查点放置要检测的仪器的探针，记录由伽马光谱仪测量的散射伽马谱，并且引入 将散射伽马谱导入预测模型中以获得空气比马尔传统真值。 该方法具有效果准确，使用的参考辐射场尺寸小，适用于空气比释动量常规真值测量的有益效果。

公开(公告)号：EP2881974A1

公开(公告)日：2015-06-10

申请号：EP13197009.7

申请日：2013-12-12

申请人： Institute of Solid State Physics, University of Latvia

发明人： Purans, Juris

IPC分类号： H01J37/32 ,  C23C14/52 ,  G01N23/223 ,  H05H1/00 ,  H01J37/34

CPC分类号： H01J37/32972 ,  C23C14/52 ,  G01N23/223 ,  G01N2223/638 ,  H01J37/32981 ,  H01J37/3405 ,  H05H1/005

摘要： The present invention relates to the methods and devices for controlling a reactive sputtering deposition of a selected material. The proposed device comprises: a vacuum chamber; a means for supplying of an inert and reactive gas into the vacuum chamber; a means adapted for providing a command to the means for supplying of an inert and/or reactive gas into the vacuum chamber; a source adapted for generating plasma and/or creating a flux of sputtered particles of material; a means adapted for holding or placing on it a substrate to be subjected to sputtering of a film of a selected material; an X-ray source adapted to expose a sputtering target by an X-ray beam; an X-ray fluorescence polycapillary confocal probe adapted to be placed inside of the vacuum chamber and comprising an X-ray optic, where the probe is adapted to collect the X-ray fluorescence signals from a part of the sputtering target and direct them to a signal detecting unit; an X-ray energy sensitive detector being optically connected with the polycapillary confocal probe such as to enable the X-ray optic to direct X-ray fluorescence beam towards the detector from the optic's input end facing the surface of the sputtering target; where the X-ray energy sensitive detector being connected at least with the means for processing the detected signals or interpreting the signals received on the state of oxidation of the target.

摘要翻译： 本发明涉及用于控制所选材料的反应溅射沉积的方法和装置。 所提出的装置包括：真空室; 用于将惰性和反应性气体供应到真空室中的装置; 适于向惰性和/或反应性气体供应到真空室中的装置提供指令的装置; 适于产生等离子体和/或产生溅射的材料颗粒的流量的源; 适于将其放置在要被溅射所选材料的薄膜的基底上的装置; 适于通过X射线束曝光溅射靶的X射线源; X射线荧光多毛细共聚焦探针，其适于放置在真空室的内部并且包括X射线光学元件，其中探针适于从溅射靶的一部分收集X射线荧光信号并将其引导到 信号检测单元; X射线能量敏感检测器与多毛细共聚焦探针光学连接，以使X射线光学器件可以从面向溅射靶表面的光学器件输入端向检测器引导X射线荧光束; 其中X射线能量敏感检测器至少与用于处理检测到的信号的装置相连，或解释在目标氧化状态下接收的信号。

公开(公告)号：EP2850419A1

公开(公告)日：2015-03-25

申请号：EP13731950.5

申请日：2013-05-17

申请人： Elettra - Sincrotrone Trieste S.C.P.A.

发明人： PELOI, Marco ,  BUSETTO, Edoardo ,  REBUFFI, Luca ,  TEFOUET KANA, Emmanuel

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N1/2208 ,  G01N2001/2893 ,  G01N2223/076 ,  G01N2223/1016 ,  G01N2223/303 ,  G01N2223/638

摘要： A method (100) of measuring chemical species in a sample by x-ray fluorescence comprising the steps of: - arranging (110) a sample to be analysed including one or more chemical species to be identified and measured, - exposing (120) the sample to x-radiation, - measuring a spectrum (130) associated with the chemical species, - recognising (140) the chemical species by identifying the energy value of one or more peaks of the spectrum, - calculating the mass (150) of each of the chemical species by analysing said spectrum, on the basis of the number of counts associated with each of the peaks (K, L) of the measured spectrum, the mass of each of said chemical species being calculated on the basis of the number of counts associated with each of the peaks (K, L), - a preliminary calibration step (101) wherein a linear relationship between the number of counts associated with each peak and the mass of the corresponding chemical species associated with said peak is identified by deposition of a plurality of calibration solutions on respective rough, impermeable surfaces (55) of respective calibration supports (50) that are identical to each other, each of said calibration solutions comprising a predefined amount of a chemical species.

摘要翻译： 一种通过X射线荧光测量样品中的化学物质的方法（100），包括以下步骤： - 将要分析的样品（110）包括一个或多个待鉴定和测量的化学物质， - 将（120） 样品到x辐射， - 测量与化学物质相关的光谱（130）， - 通过识别光谱的一个或多个峰的能量值来识别（140）化学物质， - 计算每个光谱的质量（150） 通过分析所述光谱，基于与测量光谱的每个峰（K，L）相关联的计数数，所述化学物质的质量基于以下数量计算： 与每个峰（K，L）相关联的计数， - 初步校准步骤（101），其中与每个峰相关联的计数数与与所述峰相关联的相应化学物质的质量之间的线性关系通过沉积 的 在相应的校准支撑件（50）的相应粗糙的不渗透表面（55）上的彼此相同的多个校准溶液，每个所述校准溶液包含预定量的化学物质。

公开(公告)号：EP2881974B1

公开(公告)日：2018-07-18

申请号：EP13197009.7

申请日：2013-12-12

申请人： Institute of Solid State Physics, University of Latvia

发明人： Purans, Juris

IPC分类号： H01J37/32 ,  C23C14/52 ,  G01N23/223 ,  H05H1/00 ,  H01J37/34

CPC分类号： H01J37/32972 ,  C23C14/52 ,  G01N23/223 ,  G01N2223/638 ,  H01J37/32981 ,  H01J37/3405 ,  H05H1/005

摘要： The present invention relates to the methods and devices for controlling a reactive sputtering deposition of a selected material. The proposed device comprises: a vacuum chamber; a means for supplying of an inert and reactive gas into the vacuum chamber; a means adapted for providing a command to the means for supplying of an inert and/or reactive gas into the vacuum chamber; a source adapted for generating plasma and/or creating a flux of sputtered particles of material; a means adapted for holding or placing on it a substrate to be subjected to sputtering of a film of a selected material; an X-ray source adapted to expose a sputtering target by an X-ray beam; an X-ray fluorescence polycapillary confocal probe adapted to be placed inside of the vacuum chamber and comprising an X-ray optic, where the probe is adapted to collect the X-ray fluorescence signals from a part of the sputtering target and direct them to a signal detecting unit; an X-ray energy sensitive detector being optically connected with the polycapillary confocal probe such as to enable the X-ray optic to direct X-ray fluorescence beam towards the detector from the optic's input end facing the surface of the sputtering target; where the X-ray energy sensitive detector being connected at least with the means for processing the detected signals or interpreting the signals received on the state of oxidation of the target.

公开(公告)号：EP3063533A1

公开(公告)日：2016-09-07

申请号：EP14796539.6

申请日：2014-10-28

申请人： Kromek Limited

发明人： POWELL, Andrew Keith

IPC分类号： G01N23/10 ,  G06T11/00

CPC分类号： G01N23/10 ,  G01N2223/305 ,  G01N2223/636 ,  G01N2223/637 ,  G01N2223/638 ,  G01N2223/639 ,  G01N2223/643 ,  G01V5/0016

摘要： A method for the inspection of contained flowable materials within containers, such as detecting an explosive liquid in a luggage, and an apparatus for performing the method are described. The method includes the steps of: - performing a radiation scan, using X-rays or Gamma rays, of a target item container of contained flowable material in a radiation scanning system to derive a spatially distributed and spectroscopically resolved measured dataset of the intensity of radiation emergent from the target item; - considering the spatially distributed and spectroscopically resolved dataset of transmitted radiation intensity to be nominally determined in accordance with a relationship: [Ο] • [δ] = [λ] where the operators [δ] and [λ] definie, respectively, physical parameters describing the liquid and the container and the system response and the operator [Ο] defines the relationships between the system response and the liquid and container parameters; - numerically processing the measured dataset by operator inversion in order to derive a best fit solution of: [δ] = [Ο]
-
1 • [λ]; and - using that derived solution to determine the threat status of the target item.

公开(公告)号：EP0482035B1

公开(公告)日：1994-10-12

申请号：EP90910526.4

申请日：1990-07-06

申请人： NORSK HYDRO A/S

发明人： SONTVEDT, Terje

IPC分类号： G01N3/56 ,  G01N15/06

CPC分类号： G01N3/567 ,  G01N23/222 ,  G01N33/28 ,  G01N2015/0046 ,  G01N2015/0053 ,  G01N2223/074 ,  G01N2223/0745 ,  G01N2223/634 ,  G01N2223/636 ,  G01N2223/637 ,  G01N2223/638

摘要： The invention relates to a method of measuring or detecting an unkown distribution and content of solid material in a flow of liquid and gas, without any calibration. One or several activated probes emitting radiation are used. The radiation is measured by a detector on the outside of the pipe. Each probe emits radiation only to one detector. The probes are mounted apart both lengthwise and across the pipe section. The probes are mounted with an angle alpha to the fluid flow, 20 DEG

公开(公告)号：EP0482035A1

公开(公告)日：1992-04-29

申请号：EP90910526.0

申请日：1990-07-06

申请人： NORSK HYDRO A/S

发明人： SONTVEDT, Terje

IPC分类号： G01N3 ,  G01N15 ,  G01N23 ,  G01N33

CPC分类号： G01N3/567 ,  G01N23/222 ,  G01N33/28 ,  G01N2015/0046 ,  G01N2015/0053 ,  G01N2223/074 ,  G01N2223/0745 ,  G01N2223/634 ,  G01N2223/636 ,  G01N2223/637 ,  G01N2223/638

摘要： L'invention concerne un procédé destiné à mesurer ou à détecter, sans étalonnage, un contenu et une distribution inconnus d'une matière solide dans un flux de liquide ou de gaz. L'on utilise une ou plusieurs sondes activées qui émettent des radiations. Les radiations sont mesurées par un détecteur situé à l'extérieur du tuyau. Chaque sonde n'émet des radiations que vers un seul détecteur. Les sondes sont montées séparément à la fois dans le sens longitudinal et dans le sens transversal de la section de tuyau. Les sondes sont montées à un angle alpha relatif au flux de fluide, 20°

公开(公告)号：EP0453225A1

公开(公告)日：1991-10-23

申请号：EP91303342.9

申请日：1991-04-16

申请人： Hughes Aircraft Company

发明人： Purcell, Lauren M. ,  Lawrence, Albert F.

IPC分类号： G01N27/00

CPC分类号： G01N23/00 ,  G01N21/17 ,  G01N2021/8571 ,  G01N2223/418 ,  G01N2223/426 ,  G01N2223/637 ,  G01N2223/638 ,  G01N2223/652 ,  Y10S977/852

摘要： Apparatus and methods for identifying the nature of an unidentified substrate present in trace amounts of known gaseous or liquid media such as air or water include collecting a sample of the substance in the media, filtering and concentrating the sample, depositing at least a portion of the sample on a known substrate, analyzing the deposited sample utilizing SETM, NFOM and/or AFM techniques to form one or more images characteristic of the unidentified substance, and then identifying the substance by comparing the images so obtained to images of known substances obtained using the same techniques.

摘要翻译： 用于鉴定存在于微量已知的气体或液体介质如空气或水中的未鉴定底物的性质的装置和方法包括将物质样品收集在介质中，过滤和浓缩样品，沉积至少一部分 在已知基板上进行样品分析，利用SETM，NFOM和/或AFM技术分析沉积的样品，形成一个或多个不明物质的特征图像，然后通过将所获得的图像与使用 相同的技术。