公开(公告)号：EP1999664A4

公开(公告)日：2009-05-27

申请号：EP07717461

申请日：2007-01-29

Applicant: IBM

Inventor： DICKSTEIN ERIC ,  DZIEDZIC ALAN ,  BURDA RICHARD

IPC: G06F19/00 ,  G07F17/32

CPC classification number: G05B19/41865 ,  G05B2219/32247 ,  G05B2219/35532 ,  G05B2219/45031 ,  G07F17/32 ,  G07F17/3262 ,  G07F17/3295 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/86 ,  Y10S707/99943

Abstract: A system (110) for dispatching a plurality of semiconductor lots (155, 160) among a plurality of tools is provided. The system includes a dispatch server manager (120) and a dispatch integrator and display device (110). The dispatch integrator and display device conveys a dispatch request (115) to the manager and receives a dispatch list (125) from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code (180) related to the processing status.