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1.COMPLIANT PASSIVATED EDGE SEAL FOR LOW-K INTERCONNECT STRUCTURES 审中-公开
Title translation: 灵活的钝化边缘密封与低钾相关的结构公开(公告)号:EP1721334A4
公开(公告)日:2010-04-07
申请号:EP05711281
申请日:2005-01-06
Applicant: IBM
Inventor: EDELSTEIN DANIEL , NICHOLSON LEE M
IPC: H01L23/34 , H01L23/053 , H01L23/12 , H01L23/29 , H01L23/31
CPC classification number: H01L23/3135 , H01L23/3121 , H01L23/3178 , H01L23/3185 , H01L2924/00013 , H01L2924/0002 , H01L2924/1433 , H01L2924/19041 , H01L2224/29099 , H01L2924/00