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公开(公告)号：EP2095419A4
公开(公告)日：2011-03-16
申请号：EP07865500
申请日：2007-12-11
Applicant: IBM
Inventor： FAROOQ MUKTA G , JUNG DAE-YOUNG , MELVILLE IAN D
CPC classification number: H01L21/67092 , H01L21/78 , H01L23/562 , H01L29/0657 , H01L2924/0002 , H01L2924/00
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