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公开(公告)号：EP1618609A4
公开(公告)日：2009-10-28
申请号：EP03816906
申请日：2003-04-30
Applicant: IBM
Inventor： TONTI WILLIAM R , BERRY WAYNE S , FIFIELD JOHN A , GUTHRIE WILLIAM H , KONTRA RICHARD S
IPC: H01L29/00 , H01L21/44 , H01L23/525
CPC classification number: G11C17/16 , H01L23/5256 , H01L2924/0002 , H01L2924/00
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