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1.发明公开DISCONTINUOUS/NON-UNIFORM METAL CAP STRUCTURE AND PROCESS FOR INTERCONNECT INTEGRATION 审中-公开BATCH /不统一金属帽的结构和方法用于其CONNECTING整合
公开(公告)号：EP2342743A4
公开(公告)日：2012-05-16
申请号：EP09819613
申请日：2009-07-21
Applicant: IBM
Inventor： GIGNAC LYNNE M , HU CHAO-KUN , MITTAL SURBHI , YANG CHIH-CHAO
IPC: H01L21/768 , H01L23/532
CPC classification number: H01L23/53238 , H01L21/02362 , H01L21/76849 , H01L21/76865 , H01L21/76868 , H01L23/5283 , H01L23/53223 , H01L23/53252 , H01L23/53266 , H01L23/5329 , H01L2924/0002 , H01L2924/00
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