Abstract:
A process is described for semiconductor device integration at chip level or wafer level, in which vertical connections are formed through a substrate (1). A metallized feature (2) is formed in the top surface of a substrate, and a handling plate (35) is attached to the substrate. The substrate is then thinned at the bottom surface thereof to expose the bottom of the feature, to form a conducting through-via (20). The substrate may comprise a chip (44) having a device (30), e.g. a PE chip. The plate may be a wafer (65) attached to the substrate using a vertical stud/via interconnection. The substrate and plate may each have devices (30,60) fabricated therein, so that the process provides vertical wafer-level integration of the devices.
Abstract:
A matrix addressed display system designed so as to enable data line (22) repair by electronic mechanisms which is efficient and low in cost and thus increases yield. Such active data line (22) repair utilizes additional data driver (36) outputs, a defect map memory (48) in the TFT/LCD module and modification of the data stream to the data drivers (36) by additional circuits (42) between the display and the display adapter. A bus configuration on the display substrate is utilized which combines repair flexibility, low parasitic capacitance, and the ability to easily make the necessary interconnections. The number of interconnections is kept to a minimum, the connections are reliable, and the connections may be made with conventional wire bond or laser bond technology, or disk bond technology.