公开(公告)号：EP1854131A4

公开(公告)日：2011-03-30

申请号：EP06849665

申请日：2006-01-12

Applicant: IBM

Inventor： DIMITRAKOPOULOS CHRISTOS D ,  GATES STEPHEN M ,  GRILL ALFRED ,  LANE MICHAEL W ,  LINIGER ERIC G ,  LIU XIAO HU ,  NGUYEN SON VAN ,  NEUMAYER DEBORAH A ,  SHAW THOMAS M

IPC: H01L21/20 ,  B05C11/00 ,  B32B3/26

CPC classification number: H01L21/76834 ,  C23C16/30 ,  C23C16/56 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02274 ,  H01L21/02282 ,  H01L21/02348 ,  H01L21/3105 ,  H01L21/31058 ,  H01L21/31633 ,  H01L21/76801 ,  H01L21/76825 ,  H01L21/76828 ,  H01L21/76829 ,  H01L21/76832 ,  Y10T428/249953 ,  Y10T428/249969 ,  Y10T428/249979