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1.DIELECTRIC CAP HAVING MATERIAL WITH OPTICAL BAND GAP TO SUBSTANTIALLY BLOCK UV RADIATION DURING CURING TREATMENT, AND RELATED METHODS 审中-公开
Title translation: 与光学带隙的材料的介电CLOSURE基本上LOCKED对UV辐射硬化及相关过程期间公开(公告)号:EP2111637A4
公开(公告)日:2012-08-08
申请号:EP08728172
申请日:2008-01-24
Applicant: IBM
Inventor: BELYANSKY MICHAEL P , BONILLA GRISELDA , LIU XIAO HU , NGUYEN SON VAN , SHAW THOMAS M , SHOBHA HOSADURGA K , YANG DAEWON
IPC: H01L23/12 , H01L21/3105 , H01L21/318 , H01L21/768
CPC classification number: H01L21/02123 , H01L21/02126 , H01L21/02167 , H01L21/0217 , H01L21/02274 , H01L21/02348 , H01L21/318 , H01L21/3185 , H01L21/76826 , H01L21/76828 , H01L21/76834
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2.ULTRALOW DIELECTRIC CONSTANT LAYER WITH CONTROLLED BIAXIAL STRESS 审中-公开
Title translation: LAYER超低介电常数和控制性双轴应力公开(公告)号:EP1854131A4
公开(公告)日:2011-03-30
申请号:EP06849665
申请日:2006-01-12
Applicant: IBM
Inventor: DIMITRAKOPOULOS CHRISTOS D , GATES STEPHEN M , GRILL ALFRED , LANE MICHAEL W , LINIGER ERIC G , LIU XIAO HU , NGUYEN SON VAN , NEUMAYER DEBORAH A , SHAW THOMAS M
CPC classification number: H01L21/76834 , C23C16/30 , C23C16/56 , H01L21/02126 , H01L21/02203 , H01L21/02274 , H01L21/02282 , H01L21/02348 , H01L21/3105 , H01L21/31058 , H01L21/31633 , H01L21/76801 , H01L21/76825 , H01L21/76828 , H01L21/76829 , H01L21/76832 , Y10T428/249953 , Y10T428/249969 , Y10T428/249979
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