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1.发明公开
公开(公告)号：EP2024995A4
公开(公告)日：2013-07-03
申请号：EP07797764
申请日：2007-05-25
Applicant: IBM
Inventor： CHIDAMBARRAO DURESETI , HENSON WILLIAM K , NG HUNG Y , RIM KERN , WANN CLEMENT H
IPC: H01L21/76 , H01L21/762 , H01L21/764
CPC classification number: H01L21/764 , H01L21/76283
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