-
1.PE-ALD OF TaN DIFFUSION BARRIER REGION ON LOW-K MATERIALS 有权
Title translation: 等离子体增强的原子层沉积的TAN扩散势垒区ON低k材料公开(公告)号:EP1756856A4
公开(公告)日:2010-02-17
申请号:EP05755089
申请日:2005-05-31
Applicant: IBM
Inventor: DUNN DERREN N , KIM HYUNGJUN , ROSSNAGEL STEPHEN M , SEO SOON-CHEON
IPC: H01L21/283 , H01L21/285 , H01L21/4763 , H01L21/52 , H01L21/768 , H01L23/52 , H01L23/532
CPC classification number: H01L21/76846 , H01L21/28562 , H01L23/53238 , H01L23/5329 , H01L2924/0002 , H01L2924/00
-
2.POST DEPOSITION METHOD FOR REGROWTH OF CRYSTALLINE PHASE CHANGE MATERIAL 审中-公开
Title translation: NACHABLAGERUNGSVERFAHREN对于新品种的晶相变材料公开(公告)号:EP2534710A4
公开(公告)日:2015-05-06
申请号:EP11742594
申请日:2011-01-10
Applicant: IBM
Inventor: CHUNG LAM H , ROSSNAGEL STEPHEN M , SCHROTT ALEJANDRO G
IPC: H01L45/00
CPC classification number: H01L45/06 , H01L45/1233 , H01L45/143 , H01L45/144 , H01L45/1641 , H01L45/1683
-
3.NANOPOROUS SEMI-PERMEABLE MEMBRANE AND METHODS FOR FABRICATING THE SAME 审中-公开
Title translation: NANOPORÖSE,SEMERERABLE MEMBRAN UND VERFAHREN ZU IHRER HERSTELLUNG公开(公告)号:EP2523748A4
公开(公告)日:2017-03-01
申请号:EP11733229
申请日:2011-01-10
Applicant: IBM
Inventor: AFZALI-ARDAKANI ALI , ROSSNAGEL STEPHEN M
IPC: B01D71/02 , B01D61/02 , B01D67/00 , C02F1/44 , C02F103/08
CPC classification number: B01D67/0065 , B01D61/025 , B01D67/0088 , B01D71/025 , B01D2313/90 , C02F1/441 , C02F2103/08 , C02F2305/08 , Y02A20/131
Abstract: A filter includes a membrane having a plurality of nanochannels formed therein. Functionalized nanoparticles are deposited through self assembly onto surfaces defining the nanochannels so as to decrease the final diameter of the membrane. Methods for making and using the filter are also provided.
Abstract translation: 过滤器包括其中形成有多个纳米通道的膜。 官能化纳米颗粒通过自组装沉积到限定纳米通道的表面上,以便降低膜的最终直径。 还提供了制造和使用过滤器的方法。
-
-