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公开(公告)号:EP1753609A4
公开(公告)日:2011-11-30
申请号:EP05776495
申请日:2005-05-25
Applicant: IBM
Inventor: GALLAGHER EMILY E , KINDT LOUIS M , THIEL CAREY W
IPC: G01F9/00 , B32B9/00 , B32B15/00 , B32B17/06 , G03C5/00 , G03F1/00 , G03F1/14 , G21K1/06 , G21K5/00
CPC classification number: B82Y10/00 , B82Y40/00 , G03F1/24 , G21K1/062 , G21K2201/067