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1.发明公开SELF-FORMING TOP ANTI-REFLECTIVE COATING COMPOSITIONS AND, PHOTORESIST MIXTURES AND METHOD OF IMAGING USING SAME 有权自身建设的反射涂料组合物抗性照片插图MIXES和程序
公开(公告)号：EP2389359A4
公开(公告)日：2012-06-13
申请号：EP10756762
申请日：2010-03-24
Applicant: IBM
Inventor： HUANG WU-SONG , POPOVA IRENE , VARANASI PUSHKARA RAO , VYKLICKY LIBOR
IPC: C07C409/22 , G03C1/00
CPC classification number: C08F212/34 , C08F212/32 , C08F220/22 , C08F220/26 , C08F220/28 , G03F7/0046 , G03F7/0392 , G03F7/091
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