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公开(公告)号：EP1869700A4
公开(公告)日：2010-12-15
申请号：EP06740771
申请日：2006-04-07
Applicant: IBM
Inventor： YANG CHIH-CHAO , CLEVENGER LAWRENCE A , COWLEY ANDREW P , DALTON TIMOTHY J , YOON MEEYOUNG H
IPC: H01L21/4763 , H01L21/768
CPC classification number: H01L21/76849 , H01L21/76807 , H01L21/76814 , H01L21/76831 , H01L21/76843 , H01L2924/0002 , H01L2924/00
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