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公开(公告)号：EP1525500A1
公开(公告)日：2005-04-27
申请号：EP03765942.2
申请日：2003-07-23
申请人： INTEL CORPORATION
发明人： ZHENG, Jun-Fei , DAVIDS, Paul
CPC分类号： G02B6/12004 , G02B6/1228 , G02B6/42 , G02B2006/12195
摘要： Waveguide photodetector apparatus and methods employing an optical waveguide having a tapered section, which may be horizontally tapered, vertically tapered, or both. The apparatus also includes a photodetector with an intrinsic region, which in one embodiment may be tapered in a manner corresponding to a horizontal taper of the tapered section. The photodetector is arranged adjacent the tapered section such that the intrinsic region is coupled to the optical waveguide via an evanescent wave of a guided lightwave. The tapered section serves to force energy carried in the guided lightwave from the optical waveguide into the intrinsic region of the photodetector via the evanescent wave, thereby shortening the photodetector length.
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公开(公告)号：EP1478962A2
公开(公告)日：2004-11-24
申请号：EP03715990.2
申请日：2003-02-07
申请人： INTEL CORPORATION
发明人： DAVIDS, Paul , RESHOTKO, Miriam , BLOCK, Bruce
CPC分类号： G02B6/4214 , G02B2006/12061
摘要： A waveguide including a waveguide core having a top surface that defines an angle. A waveguide can include a waveguide core offset from a substrate by a cladding layer. A phototransistor includes an emitter, a collector, and a base in lateral alignment. A photodiode includes n- and p- type regions and an intrinsic substrate portion in lateral alignment. A waveguide includes a waveguide core, an attenuating layer, and a detector layer. A method for fabricating a device includes forming a cladding layer over a substrate having a detector layer formed thereon; forming an opening in the cladding layer to expose the detector layer; forming a waveguide layer over the cladding layer and the opening; removing a portion of the waveguide layer to define a waveguide core; and implanting first and second regions into the detector layer proximate the waveguide core.
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公开(公告)号：EP1525500B1
公开(公告)日：2009-10-21
申请号：EP03765942.2
申请日：2003-07-23
申请人： Intel Corporation
发明人： ZHENG, Jun-Fei , DAVIDS, Paul
IPC分类号： G02B6/122
CPC分类号： G02B6/12004 , G02B6/1228 , G02B6/42 , G02B2006/12195
摘要： Waveguide photodetector apparatus and methods employing an optical waveguide having a tapered section, which may be horizontally tapered, vertically tapered, or both. The apparatus also includes a photodetector with an intrinsic region, which in one embodiment may be tapered in a manner corresponding to a horizontal taper of the tapered section. The photodetector is arranged adjacent the tapered section such that the intrinsic region is coupled to the optical waveguide via an evanescent wave of a guided lightwave. The tapered section serves to force energy carried in the guided lightwave from the optical waveguide into the intrinsic region of the photodetector via the evanescent wave, thereby shortening the photodetector length.
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公开(公告)号：EP1478962B1
公开(公告)日：2008-04-23
申请号：EP03715990.2
申请日：2003-02-07
申请人： Intel Corporation
发明人： DAVIDS, Paul , RESHOTKO, Miriam , BLOCK, Bruce
CPC分类号： G02B6/4214 , G02B2006/12061
摘要： A waveguide including a waveguide core having a top surface that defines an angle. A waveguide can include a waveguide core offset from a substrate by a cladding layer. A phototransistor includes an emitter, a collector, and a base in lateral alignment. A photodiode includes n- and p- type regions and an intrinsic substrate portion in lateral alignment. A waveguide includes a waveguide core, an attenuating layer, and a detector layer. A method for fabricating a device includes forming a cladding layer over a substrate having a detector layer formed thereon; forming an opening in the cladding layer to expose the detector layer; forming a waveguide layer over the cladding layer and the opening; removing a portion of the waveguide layer to define a waveguide core; and implanting first and second regions into the detector layer proximate the waveguide core.
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