公开(公告)号：EP1543560A1

公开(公告)日：2005-06-22

申请号：EP03797235.3

申请日：2003-08-12

申请人： Infineon Technologies AG ,  Kabushiki Kaisha Toshiba

发明人： BEITEL, Gerhard ,  HILLIGER, Andreas ,  MOON, Bum-Ki ,  NAGEL, Nicolas ,  TSUCHIYA, Takamichi ,  YABUKI, Moto

IPC分类号： H01L27/115 ,  H01L21/8246

CPC分类号： H01L28/75 ,  H01L21/28568 ,  H01L28/60 ,  H01L28/90

摘要： A capacitor over plug (COP) structure is disclosed. The COP avoids the step which is created in conventional COP structures, which adversely impacts the properties of the capacitor. In one embodiment, the step is avoided by providing a plug having upper and lower portions. The upper portion, which is coupled to the bottom electrode of the capacitor, has substantially the same surface area as the bottom electrode. A barrier layer can be provided between the plug and bottom electrode to avoid oxidation of the plug material.

公开(公告)号：EP1543560B1

公开(公告)日：2008-05-21

申请号：EP03797235.3

申请日：2003-08-12

申请人： Qimonda AG ,  KABUSHIKI KAISHA TOSHIBA

发明人： BEITEL, Gerhard ,  HILLIGER, Andreas ,  MOON, Bum-Ki ,  NAGEL, Nicolas ,  TSUCHIYA, Takamichi ,  YABUKI, Moto

IPC分类号： H01L27/115 ,  H01L21/8246

CPC分类号： H01L28/75 ,  H01L21/28568 ,  H01L28/60 ,  H01L28/90

摘要： A capacitor over plug (COP) structure is disclosed. The COP avoids the step which is created in conventional COP structures, which adversely impacts the properties of the capacitor. In one embodiment, the step is avoided by providing a plug having upper and lower portions. The upper portion, which is coupled to the bottom electrode of the capacitor, has substantially the same surface area as the bottom electrode. A barrier layer can be provided between the plug and bottom electrode to avoid oxidation of the plug material.