专利检索 ap:("Integrated Dynamics Engineering GmbH") AND inv:"VAN LOON, Guido" 第 1 页

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发明公开
SERVICEEINRICHTUNG FÜR EIN ANLAGENMODUL 审中-公开
标题翻译：工厂模块的服务设备

公开(公告)号：EP3308393A1

公开(公告)日：2018-04-18

申请号：EP16709369.9

申请日：2016-03-09

申请人： Integrated Dynamics Engineering GmbH

发明人： BIRKNER, Andreas , VAN LOON, Guido , EVERS, Arndt

IPC分类号： H01L21/67 , H01L21/677

CPC分类号： H01L21/6719

摘要： The invention relates to a service module, by which a conditioning module, which serves in particular for the processing of wafers, can be withdrawn from a plant.