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公开(公告)号：EP0450771A3
公开(公告)日：1993-02-24
申请号：EP91301998.0
申请日：1991-03-11
IPC分类号： H01J37/317 , G03F1/08 , G11B9/00
CPC分类号： B82B3/00 , G01Q80/00 , G11B9/14 , H01J2237/31738 , Y10S977/857
摘要： Submicron structures are written on a surface (12) by positioning in nanometer range proximity, preferably within current tunnelling range, of the surface a scanning tip (11) of a material that emits atoms upon application of an applied voltage of low magnitude. While the tip is maintained within said range, it is moved relative to the surface, and a series of short voltage pulses are concurrently applied between the tip and surface. These pulses cause atoms of tip material to directly transfer to the surface and concurrently cause remaining atoms (21) of tip material to migrate to the tip and continuously reform the tip and maintain its sharp configuration, thereby insuring uninterrupted writing ability. Various tip materials exhibiting low field evaporation potentials may be used; however, gold is preferred if deposition is to be under ambient conditions. Heating the tip enhances the ability of the material to emit atoms. The deposited structures (20) may be selectively sensed or erased by application of appropriate voltages.
摘要翻译： 亚微米结构通过在施加低幅度施加电压时发射原子的材料的扫描尖端的表面定位在表面的纳米范围附近，优选在当前隧道范围内定位。 当尖端保持在所述范围内时，其相对于表面移动，并且在尖端和表面之间同时施加一系列短脉冲。 这些脉冲使尖端材料的原子直接转移到表面，并且同时引起尖端材料的剩余原子迁移到尖端，并连续地改变尖端并保持其尖锐的构型，从而确保不间断的写入能力。 可以使用表现出低场蒸发电位的各种尖端材料; 然而，如果沉积处于环境条件下，则优选金。 加热尖端增强了材料发射原子的能力。 可以通过施加适当的电压来选择性地感测或擦除沉积的结构。
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2.发明公开Method and apparatus for writing by the emission of atoms 失效Methode undGerätzum Schreiben mittels Atomemission。
公开(公告)号：EP0450771A2
公开(公告)日：1991-10-09
申请号：EP91301998.0
申请日：1991-03-11
IPC分类号： H01J37/317 , G03F1/08 , G11B9/00
CPC分类号： B82B3/00 , G01Q80/00 , G11B9/14 , H01J2237/31738 , Y10S977/857
摘要： Submicron structures are written on a surface (12) by positioning in nanometer range proximity, preferably within current tunnelling range, of the surface a scanning tip (11) of a material that emits atoms upon application of an applied voltage of low magnitude. While the tip is maintained within said range, it is moved relative to the surface, and a series of short voltage pulses are concurrently applied between the tip and surface. These pulses cause atoms of tip material to directly transfer to the surface and concurrently cause remaining atoms (21) of tip material to migrate to the tip and continuously reform the tip and maintain its sharp configuration, thereby insuring uninterrupted writing ability. Various tip materials exhibiting low field evaporation potentials may be used; however, gold is preferred if deposition is to be under ambient conditions. Heating the tip enhances the ability of the material to emit atoms. The deposited structures (20) may be selectively sensed or erased by application of appropriate voltages.
摘要翻译： 亚微米结构通过在施加低幅度施加电压时发射原子的材料的扫描尖端的表面定位在表面的纳米范围附近，优选在当前隧道范围内定位。 当尖端保持在所述范围内时，其相对于表面移动，并且在尖端和表面之间同时施加一系列短脉冲。 这些脉冲使尖端材料的原子直接转移到表面，并且同时引起尖端材料的剩余原子迁移到尖端，并连续地改变尖端并保持其尖锐的构型，从而确保不间断的写入能力。 可以使用表现出低场蒸发电位的各种尖端材料; 然而，如果沉积处于环境条件下，则优选金。 加热尖端增强了材料发射原子的能力。 可以通过施加适当的电压来选择性地感测或擦除沉积的结构。
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公开(公告)号：EP0450771B1
公开(公告)日：1997-06-04
申请号：EP91301998.0
申请日：1991-03-11
IPC分类号： H01J37/317 , G03F1/08 , G11B9/00
CPC分类号： B82B3/00 , G01Q80/00 , G11B9/14 , H01J2237/31738 , Y10S977/857
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