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    Sensor for converting a distance to optical and further to electrical energy, and surface scanning apparatus using same
    2.
    发明公开
    Sensor for converting a distance to optical and further to electrical energy, and surface scanning apparatus using same 失效
    传感器，用于在光学和进一步转化为电能的转换的距离; 为通过使用相同的扫描表面的装置。

    公开(公告)号：EP0308537A1

    公开(公告)日：1989-03-29

    申请号：EP87114008.3

    申请日：1987-09-25

    申请人： International Business Machines Corporation ,  Leica Industrieverwaltung GmbH

    发明人： Dürig, Urs Theodor, Dr. ,  Fischer, Ulrich Christian, Dr. ,  Pohl, Wolfgang Dieter, Dr.

    IPC分类号： G01B11/30 ,  G02B21/00 ,  G11B7/09

    CPC分类号： G01B11/306 ,  G01Q20/02 ,  G01Q60/22 ,  G11B5/6005 ,  G11B9/1409 ,  G11B11/00 ,  G11B11/10532 ,  G11B21/20

    摘要： A sensor body (1) is formed as a light waveguide for laser light (2). A light exit site (10) for light diffracted within the sensor body (1) is located at a surface (6) thereof which faces away from a measured body (M).
    A detection particle (15) is located at the surface (5) of the sensor body (1) facing the measured body (M). It has a substantially convex and rounded off form and a major dimension which is smaller than the wavelength of the light (2). The measured body (M) is located in the optical near field of the detection particle (15). The latter has a major dimension of 5 to 500 nm and preferably of 20 to 100 nm.
    A detector means (11) converts the optical energy of the diffracted light to an electrical detector signal.
    A continuous thin film (16) is provided as a coating for the sensor (S). It substantially covers the detection particle (15) and at least part of the surface (5) of the sensor body (1) in the vicinity of the detection particle (15) It has a thickness which is smaller than one half of said predetermined wavelength. Preferably it is formed of gold and has a thickness of less than 100 nm.
    The sensor is used to finally convert a distance to an electrical quantity.

    摘要翻译： 传感器主体（1）被形成为光波导激光（2）。 传感器主体（1）内的衍射光出射点（10），用于光位于一个表面（6）其面向从测量的体（M）的距离。 一种检测粒子（15）位于所述传感器主体（1）的面向测量的体（M）的表面（5）。 它有一个大致凸起和四舍五入的形式和一个大尺寸的所有比的光（2）的波长小。 被测体（M）位于所述检测粒子（15）的光学近场。 后者具有的5至500nm，优选20至100nm的主要尺寸。的检测器装置（11）的衍射光的光能量转换为在电探测器信号。 一种连续薄膜（16）被设置为用于所述传感器（S）上的涂层。 其基本覆盖检测粒子（15）和所述传感器主体（1）在检测粒子（15）的附近帮助的表面（5）的至少一部分，设有一个厚度所有这些是所述预定波长的小于一 ， 优选地，它被形成的金，并且具有的厚度为小于100纳米。该传感器用于在电气量的距离最终转化成。