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1.发明公开Method of monitoring the thickness of thin dielectric films and performance of the method 失效用于确定薄的介电层，并且该方法的应用程序的厚度方法。
公开(公告)号：EP0019724A1
公开(公告)日：1980-12-10
申请号：EP80102243.5
申请日：1980-04-25
CPC分类号： G01B11/065 , G01N21/553
摘要： The thickness of thin dielectric films covering metal surfaces can be measured while the surface and the film are in motion. This is accomplished by arranging a prism close to the moving film, passing plane polarized light into said prism so that it is totally internally reflected at the surface of the prism adjacent the film. Thereafter the angle of incidence is vaired to determine when surface plasma oscillations on the film-metal layer interface are generated. This is indicated by attenuation of the reflectivity. By measuring the reflectivity as a function of the angle of incidence, that angle of incidence which produces the minimum reflectivity can be determined and by comparing that angle of incidence to previously establised standards, the film thickness can be determined.
摘要翻译： 薄介电膜覆盖金属表面的厚度可以同时表面和膜在运动来测量。 这是通过布置靠近移动电影的棱镜来实现，使平面偏振光进入所述棱镜所以没它被全内在棱镜的相邻的膜的表面反射。 有入射角被vaired确定性矿后当膜 - 金属层的界面上的表面等离子体振荡被生成。 这是由反射率衰减指示的。 通过测量反射率作为入射角的函数，入射角度没有产生最小反射率可以是确定通过比较所开采和没有先前建立的标准的入射角，膜厚度可以是确定性的开采。
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2.发明授权
公开(公告)号：EP0019724B1
公开(公告)日：1982-12-29
申请号：EP80102243.5
申请日：1980-04-25
CPC分类号： G01B11/065 , G01N21/553
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公开(公告)号：EP0004411A3
公开(公告)日：1979-10-31
申请号：EP79300072
申请日：1979-01-17
IPC分类号： G02F01/19
CPC分类号： G02B26/02
摘要： An optical modulator suitable for use with a collimated light beam having a moderate cross section and a fast response time and operational at relatively low voltage includes a glass prism 12 and a smooth metal surface 14 that are separated by an adjustable gap 18. The gap is filled with air, having an index of refraction lower than the prism. A beam 22 of monochromatic light is passed into the prism at a specific angle of incidence 0 to undergo total internal reflection at the glass prismgap interface. A change of approximately 1 micron in the thickness of the gap is sufficient to change the reflectivity from greater than 95% to essentially zero. The size of the gap is mechanically adjusted and this mechanical device 20 determines the frequency response of the light modulation.
摘要翻译： 适用于具有适度横截面和快速响应时间并且在相对较低电压下操作的准直光束的光学调制器包括由可调间隙18分开的玻璃棱镜12和光滑金属表面14。 充满空气，折射率低于棱镜。 单色光束22以特定的入射角DIAME进入棱镜，以在玻璃棱镜界面处进行全内反射。 在间隙厚度上约1微米的变化足以将反射率从大于95％改变为基本为零。 间隙的尺寸被机械调节，并且该机械装置20确定光调制的频率响应。
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5.发明公开Optical device for and method of amplitude modulation of light beam 失效Optische Vorrichtung und Verfahren zur Amplitudenmodulation eines Lichtstrahles。
公开(公告)号：EP0004411A2
公开(公告)日：1979-10-03
申请号：EP79300072.0
申请日：1979-01-17
IPC分类号： G02F1/19
CPC分类号： G02B26/02
摘要： An optical modulator suitable for use with a collimated light beam having a moderate cross section and a fast response time and operational at relatively low voltage includes a glass prism 12 and a smooth metal surface 14 that are separated by an adjustable gap 18. The gap is filled with air, having an index of refraction lower than the prism. A beam 22 of monochromatic light is passed into the prism at a specific angle of incidence 0 to undergo total internal reflection at the glass prismgap interface. A change of approximately 1 micron in the thickness of the gap is sufficient to change the reflectivity from greater than 95% to essentially zero. The size of the gap is mechanically adjusted and this mechanical device 20 determines the frequency response of the light modulation.
摘要翻译： 适用于具有适度横截面和快速响应时间并且在相对较低电压下操作的准直光束的光学调制器包括由可调间隙18分开的玻璃棱镜12和光滑金属表面14。 充满空气，折射率低于棱镜。 单色光束22以特定的入射角DIAME进入棱镜，以在玻璃棱镜界面处进行全内反射。 在间隙厚度上约1微米的变化足以将反射率从大于95％改变为基本为零。 间隙的尺寸被机械调节，并且该机械装置20确定光调制的频率响应。
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