公开(公告)号：EP1243915B1

公开(公告)日：2009-02-04

申请号：EP00980062.4

申请日：2000-12-12

申请人： Japan Science and Technology Agency ,  RIKEN

发明人： HASEGAWA, Tsuyoshi ,  AONO, Masakazu ,  NAKAYAMA, Tomonobu ,  OKUDA, Taichi R. 204 Takezono-3-chome-juutaku-103 ,  TERABE, Kazuya ,  TANAKA, Hirofumi Room 108 Sun-Green-Takeshino

IPC分类号： G01N13/16 ,  G01N27/04 ,  G01R27/02 ,  G01R31/00

CPC分类号： G01Q60/40 ,  G01Q60/04 ,  G01R1/06727 ,  G01R1/06738 ,  Y10S977/874

摘要： An apparatus is provided for evaluating electrical characteristics by bringing a plurality of metal probes in contact with a minute area with low contact resistance. Metal probes (8) are formed on the free end of a cantilever (6) on which are formed a resistor (5), two electrodes (1, 2) for resistance detection, and an electrode (7) for measuring electrical characteristics. The tips of the metal probes (8) can project beyond the free end of the cantilever (6) to reach an area of about 10 nm size. The probe position is controlled by an atomic force microscope technique to achieve low contact resistance.

公开(公告)号：EP1243915A1

公开(公告)日：2002-09-25

申请号：EP00980062.4

申请日：2000-12-12

申请人： Japan Science and Technology Corporation ,  RIKEN

发明人： HASEGAWA, Tsuyoshi ,  AONO, Masakazu ,  NAKAYAMA, Tomonobu ,  OKUDA, Taichi R. 204 Takezono-3-chome-juutaku-103 ,  TERABE, Kazuya ,  TANAKA, Hirofumi Room 108 Sun-Green-Takeshino

IPC分类号： G01N13/16 ,  G01N27/04 ,  G01R27/02 ,  G01R31/00

CPC分类号： G01Q60/40 ,  G01Q60/04 ,  G01R1/06727 ,  G01R1/06738 ,  Y10S977/874

摘要： An apparatus is provided for evaluating electrical characteristics by bringing a plurality of metal probes in contact with a minute area with low contact resistance.
A metal probe (8) is formed on the free end of a cantilever (6) on which are formed a resistor (5), two electrodes (1, 2) for resistance detection, and an electrode (7) for measuring electrical characteristics. The tip of the metal probe (8) projects beyond the free end of the cantilever (6). This configuration enables a plurality of probes to come into contact with an area of about 10 nm size. The probe position is controlled by an atomic force microscopy to achieve low contact resistance.

摘要翻译： 提供一种用于通过使多个金属探针与具有低接触电阻的微小区域接触来评估电特性的装置。 金属探针（8）形成在形成电阻器（5）的悬臂（6）的自由端上，用于电阻检测的两个电极（1,2）和用于测量电特性的电极（7）。 金属探针（8）的尖端突出超过悬臂（6）的自由端。 该配置使得多个探针能够与约10nm大小的区域接触。 探针位置由原子力显微镜控制以实现低接触电阻。