公开(公告)号：EP1421429B1

公开(公告)日：2007-01-24

申请号：EP02742893.7

申请日：2002-04-12

申请人： Jenoptik Ldt GmbH

发明人： GESSNER, Thomas ,  DÖTZEL, Wolfram ,  KAUFMANN, Christian ,  MEHNER, Jan ,  Hahn, Ramon ,  KURT, Steffen

IPC分类号： G02B26/10

CPC分类号： G02B26/105 ,  B81B3/004 ,  B81B2201/047 ,  G02B26/0841

摘要： The invention relates to a resonance scanner in which a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1). The drive plate (4) is fixed inside the frame (3) by two first torsion springs (6) in such a manner that enables the drive plate (4) to oscillate about a common first torsion axis (8) of both torsion springs (6). The mirror (5) is fixed inside the drive plate (4) by two second torsion springs (7) in such a manner that enables the mirror (5) to oscillate about a common second torsion axis (9) of both torsion springs (7). The first torsion axis (8) and the second torsion axis (9) run parallel to one another. In addition, only the frame (3) of the actuator part (1) is fixed on lateral walls (10) of a box-shaped stator part (2). A drive means (stator electrodes (15) or a coil (24)) is placed on a bottom (11) of the stator part (2) only in the area of the geometrically two-dimensional extension of the drive plate (4). The bottom (11) has, in the area of the geometrically two-dimensional extension of the mirror, a recess (13) provided with dimensions which are large enough so that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11). The drive means (stator electrodes (15) or coil (24)) exert a force only indirectly onto the drive plate (4), and this force obeys a periodic function whose period is matched to the natural frequency of the mirror (5) that differs from the natural frequency of the drive plate (4).

公开(公告)号：EP1421429A2

公开(公告)日：2004-05-26

申请号：EP02742893.7

申请日：2002-04-12

申请人： Jenoptik Ldt GmbH

发明人： GESSNER, Thomas ,  DÖTZEL, Wolfram ,  KAUFMANN, Christian ,  MEHNER, Jan ,  Hahn, Ramon ,  KURT, Steffen

IPC分类号： G02B26/10

CPC分类号： G02B26/105 ,  B81B3/004 ,  B81B2201/047 ,  G02B26/0841

摘要： The invention relates to a resonance scanner in which a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1). The drive plate (4) is fixed inside the frame (3) by two first torsion springs (6) in such a manner that enables the drive plate (4) to oscillate about a common first torsion axis (8) of both torsion springs (6). The mirror (5) is fixed inside the drive plate (4) by two second torsion springs (7) in such a manner that enables the mirror (5) to oscillate about a common second torsion axis (9) of both torsion springs (7). The first torsion axis (8) and the second torsion axis (9) run parallel to one another. In addition, only the frame (3) of the actuator part (1) is fixed on lateral walls (10) of a box-shaped stator part (2). A drive means (stator electrodes (15) or a coil (24)) is placed on a bottom (11) of the stator part (2) only in the area of the geometrically two-dimensional extension of the drive plate (4). The bottom (11) has, in the area of the geometrically two-dimensional extension of the mirror, a recess (13) provided with dimensions which are large enough so that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11). The drive means (stator electrodes (15) or coil (24)) exert a force only indirectly onto the drive plate (4), and this force obeys a periodic function whose period is matched to the natural frequency of the mirror (5) that differs from the natural frequency of the drive plate (4).