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    INTERDIGITATING VERTICAL DAMPERS FOR MEMS-BASED ACTUATORS
    2.
    发明公开
    INTERDIGITATING VERTICAL DAMPERS FOR MEMS-BASED ACTUATORS 审中-公开

    公开(公告)号：EP3396426A1

    公开(公告)日：2018-10-31

    申请号：EP18160294.7

    申请日：2018-03-06

    Applicant: Google LLC

    Inventor： YASUMURA, Kevin Y.

    IPC: G02B6/35 ,  G02B26/08

    CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/352 ,  G02B6/3556

    Abstract: A microelectromechanical system (MEMS) mirror assembly includes a base substrate defining a cavity and a plurality of first features extending upwards from a bottom of the cavity. The MEMS mirror assembly includes a mirror substrate coupled to the base substrate and defining a MEMS actuator and a MEMS mirror platform. Actuation of the MEMS actuator moves the MEMS mirror platform from a first positional state to a second positional state. The MEMS mirror platform defines a plurality of second features on a side of the MEMS mirror platform facing the base substrate that are sized, shaped, and positioned such that the plurality of second features extend into spaces separating the plurality of first features when the mirror platform is in the second positional state. The MEMS mirror assembly includes a reflective material disposed on a side of the MEMS mirror platform facing away from the base substrate.

    3-DOF MEMS PISTON-TUBE ELECTROSTATIC MICROACTUATOR
    3.
    发明公开
    3-DOF MEMS PISTON-TUBE ELECTROSTATIC MICROACTUATOR 审中-公开

    公开(公告)号：EP3186189A4

    公开(公告)日：2018-05-09

    申请号：EP14899403

    申请日：2014-08-04

    Applicant: BA TIS FAEZ ,  BEN MRAD RIDHA

    Inventor： BA-TIS FAEZ ,  BEN-MRAD RIDHA

    IPC: B81B3/00 ,  B25J7/00 ,  G02B26/08 ,  H02N1/00

    CPC classification number: G02B26/0841 ,  B25J7/00 ,  B81B3/0037 ,  B81B3/0062 ,  B81B2201/047 ,  B81B2203/0136 ,  B81B2203/053 ,  H02N1/002

    Abstract: A three-degrees-of-freedom MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a 3-DOF motion, comprising vertical translation and bi-axial rotation about the axes of the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor or a high output torque enabling rotation of the rotor.

    OPTICAL MODULATION DEVICE
    4.
    发明公开
    OPTICAL MODULATION DEVICE 审中-公开
    光学调制装置

    公开(公告)号：EP3282306A1

    公开(公告)日：2018-02-14

    申请号：EP17184376.6

    申请日：2017-08-02

    Applicant: Sumitomo Electric Industries, Ltd.

    Inventor： FURUYA, Akira ,  TATSUMI, Taizo

    IPC: G02F1/01 ,  G02F1/21

    CPC classification number: G02F1/2255 ,  G02B26/0841 ,  G02F1/01 ,  G02F1/0121 ,  G02F1/017 ,  G02F1/225 ,  G02F2001/212 ,  H01S3/00 ,  H04B10/5161

    Abstract: An optical modulation device includes: a Mach-Zehnder modulator including a semiconductor waveguide; a plurality of phase modulators that are spaced from each other; a first amplifier that is coupled with an input transmission line transmitting an electrical signal, has an input impedance substantially equal to a characteristic impedance of the input transmission line; a first interconnection that is coupled to the first amplifier and transmits the electrical signal to a first end of one of the plurality of phase modulators that is provided on an input side of the Mach-Zehnder modulator; a second interconnection that is coupled to the first amplifier and transmits the electrical signal to a first end of the other of the plurality of phase modulators that is provided on an output side of the Mach-Zehnder modulator; and a plurality of termination resistors respectively coupled to second ends of the plurality of phase modulators.

    Abstract translation: 一种光调制装置，包括：包含半导体波导的Mach-Zehnder调制器; 多个彼此间隔开的相位调制器; 与传输电信号的输入传输线耦合的第一放大器具有基本上等于输入传输线的特性阻抗的输入阻抗; 第一互连，所述第一互连耦合到所述第一放大器并且将所述电信号传输到所述多个相位调制器中的设置在所述Mach-Zehnder调制器的输入侧上的所述多个相位调制器中的一个的第一端; 第二互连，所述第二互连耦合到所述第一放大器并且将所述电信号传输到所述多个相位调制器中的所述另一个的第一端，所述第一端提供在所述Mach-Zehnder调制器的输出侧; 以及分别耦合到所述多个相位调制器的第二端的多个终端电阻器。

    A SCANNING MIRROR DEVICE AND A METHOD FOR MANUFACTURING IT
    7.
    发明公开
    A SCANNING MIRROR DEVICE AND A METHOD FOR MANUFACTURING IT 审中-公开
    扫描反射镜装置和制造IT的方法

    公开(公告)号：EP3236304A1

    公开(公告)日：2017-10-25

    申请号：EP17165853.7

    申请日：2017-04-11

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Torkkeli, Altti ,  Laaksonen, Tapani

    IPC: G02B26/08

    CPC classification number: B81B3/0054 ,  B81B2201/042 ,  B81B2203/0163 ,  B81B2207/07 ,  B81B2207/095 ,  B81C1/0019 ,  B81C2203/0109 ,  G02B1/11 ,  G02B5/0825 ,  G02B7/1821 ,  G02B26/0816 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0858 ,  G02B26/105

    Abstract: An optical device formed of a mirror wafer (200), a cap wafer (240), and a glass wafer (260). The mirror wafer includes a first layer of electrically conductive material (202), a second layer of electrically conductive material (204), and a third layer of electrically insulating material (206) between the first layer (202) and the second layer (204). A mirror element (208) is formed of the second layer (204) of the mirror wafer, and has a reflective surface (214) in the bottom of a cavity opened into at least the first layer. A good optical quality planar glass wafer (260) can be used to enclose the mirror element (208) when the mirror wafer (200), cap wafer (240), and glass wafer (260) are bonded to each other.

    Abstract translation: 一种由镜面晶片（200），盖晶片（240）和玻璃晶片（260）形成的光学器件。 镜面晶片包括在第一层（202）和第二层（204）之间的第一导电材料层（202），第二导电材料层（204）以及第三电绝缘材料层（206） ）。 镜面元件（208）由镜面晶片的第二层（204）形成，并且在至少向第一层开口的腔体的底部中具有反射表面（214）。 当镜面晶片（200），盖晶片（240）和玻璃晶片（260）彼此接合时，可以使用良好的光学质量平面玻璃晶片（260）来包围镜元件（208）。

    HIGH POWER ADAPTIVE MIRROR
    8.
    发明公开
    HIGH POWER ADAPTIVE MIRROR 审中-公开
    ADAPTIVER HOCHLEISTUNGSSPIEGEL

    公开(公告)号：EP3182189A1

    公开(公告)日：2017-06-21

    申请号：EP15201382

    申请日：2015-12-18

    Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO

    Inventor： VAN ZWET ERWIN JOHN ,  VAN DEN DOOL TEUNIS CORNELIS ,  NIEUWKOOP EVERT

    IPC: G02B26/06 ,  G02B26/08

    CPC classification number: G02B26/0825 ,  G02B26/06 ,  G02B26/0841 ,  G02B26/0866

    Abstract: According to an aspect of the invention, there is provided a mirror structure for adaptive optics devices, characterized in that it comprises: an elastically deformable layer in response to an applied force, said deformable layer comprising a central portion reflective to said an incident light beam (F); a support substrate positioned spaced with respect to said deformable layer; a spacer element connected to said elastically deformable layer and support substrate and positioned there between, said spacer element being arranged so that the separation distance between said first and second inner surface is in the range between 2 and 100 micron; an inner chamber at least partially defined by said first and substrate and by said spacer element, said inner chamber containing a pressurized gas (G); an actuator system capable of causing a deformation of said central portion counteracting the pressure of said pressurized gas; wherein, in use, said central portion is deformed according to profiles such as to control said light beam. Advantages may include thermal robustness and improved dimensional scaling properties.

    Abstract translation: 根据本发明的一个方面，提供了一种用于自适应光学装置的反射镜结构，其特征在于包括：响应于施加的力的可弹性变形层，所述可变形层包括反射所述入射光束的中心部分 （F）; 相对于所述可变形层间隔设置的支撑基板; 连接到所述可弹性变形层和支撑衬底并定位在其间的间隔元件，所述间隔元件布置成使得所述第一和第二内表面之间的分隔距离在2和100微米之间的范围内; 至少部分地由所述第一和衬底以及所述隔离元件限定的内室，所述内室包含加压气体（G）; 致动器系统，所述致动器系统能够引起所述中心部分的变形抵消所述加压气体的压力; 其中在使用中，所述中央部分根据轮廓变形以控制所述光束。 优点可能包括热稳健性和改进的尺寸缩放性能。

    METHODS AND SYSTEM FOR WAVELENGTH TUNABLE OPTICAL COMPONENTS AND SUB-SYSTEMS
    10.
    发明公开
    METHODS AND SYSTEM FOR WAVELENGTH TUNABLE OPTICAL COMPONENTS AND SUB-SYSTEMS 审中-公开
    VERFAHREN UND SYSTEMFÜRWELLENLÄNGENABSTIMMBAREOPTISCHE KOMPONENTEN UND UNTERSYSTEME

    公开(公告)号：EP3114511A1

    公开(公告)日：2017-01-11

    申请号：EP15758740.3

    申请日：2015-03-09

    Applicant: Aeponyx Inc.

    Inventor： MENARD, Francois ,  MÉNARD, Michaël ,  NABKI, Fréderic ,  BÉRARD, Martin

    IPC: G02B6/12 ,  B81B5/00 ,  G02B26/08 ,  G02B6/125 ,  H04J14/02

    CPC classification number: G02B6/3518 ,  G02B6/12002 ,  G02B6/12007 ,  G02B6/124 ,  G02B6/357 ,  G02B6/3596 ,  G02B26/0841 ,  G02B2006/12147 ,  H01S5/021 ,  H01S5/02216 ,  H01S5/02248 ,  H01S5/12 ,  H01S5/141

    Abstract: Wavelength division multiplexing (WDM) has enabled telecommunication service providers to fully exploit the transmission capacity of optical fibers. State of the art systems in long-haul networks now have aggregated capacities of terabits per second. Moreover, by providing multiple independent multi-gigabit channels, WDM technologies offer service providers with a straight forward way to build networks and expand networks to support multiple clients with different requirements. In order to reduce costs, enhance network flexibility, reduce spares, and provide re-configurability many service providers have migrated away from fixed wavelength transmitters, receivers, and transceivers, to wavelength tunable transmitters, receivers, and transceivers as well as wavelength dependent add-drop multiplexer, space switches etc. However, to meet the competing demands for improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, re-configurability, and lower cost it is desirable to exploit/adopt are monolithic optical circuit technologies, hybrid optoelectronic integration, and microelectromechanical systems (MEMS).

    Abstract translation: 波分复用（WDM）使得电信服务提供商能够充分利用光纤的传输能力。 长距离网络中最先进的系统现在具有每秒吞吐能力的综合能力。 此外，通过提供多个独立的多吉比特信道，WDM技术为服务提供商提供了直接建立网络和扩展网络的方式，以支持具有不同需求的多个客户端。 为了降低成本，增强网络灵活性，减少备件，并提供许多服务提供商已经从固定波长发射器，接收器和收发器迁移到波长可调发射器，接收器和收发器以及波长依赖的附加功能的可重新配置， 然而，为了满足改善性能，增加集成度，减少占地面积，降低功耗，增加灵活性，可重新配置性和降低成本的竞争需求，所以开发/采用的是单片光电路技术 ，混合光电集成和微机电系统（MEMS）。

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