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公开(公告)号：EP1913691B1
公开(公告)日：2015-07-29
申请号：EP06731103.5
申请日：2006-03-29
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公开(公告)号：EP1917717A1
公开(公告)日：2008-05-07
申请号：EP06715661.2
申请日：2006-03-08
IPC分类号： H03H9/17
CPC分类号： H03H9/174 , H03H9/02125 , H03H9/132 , H03H9/588 , H03H9/605
摘要： A thin-film piezoelectric resonator includes: a lower electrode (11) provided on the principal surface of the substrate (10) so as to cover the cavity (14); a piezoelectric film (12) provided on the lower electrode (11) so as to be located above the cavity (14); and an upper electrode (13). The upper electrode (13) has a main portion (13a) which overlaps a part of the cavity (14), a protruding portion (13b) connected on one side to the main portion (13), a connecting portion (13c) provided at the opposite side of the main portion (13), and an extension portion (13d) connected to the connecting portion (13c). The length of the protruding portion (13b) is substantially the same as the length of the connecting portion (13c), so that the overlap area of the upper (13) and lower (11) electrodes outside the cavity region is constant with respect to a shift of the cavity (14) location. As a result, the total sum of the parasitic capacitances in the upper (13) and lower (11) electrodes facing each other outside the cavity (14) does not vary with a shift of the cavity (14) location.
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公开(公告)号：EP1913691A1
公开(公告)日：2008-04-23
申请号：EP06731103.5
申请日：2006-03-29
摘要： A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cavity and tapered to have an inner angle of 30 degrees or smaller defined by a part of the periphery thereof and a bottom thereof.
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