摘要:
There is provided a piezoelectric resonator and a piezoelectric thin-film filter including the piezoelectric resonator, the piezoelectric resonator being capable of suppressing long-wavelength spurious modes and short-wavelength spurious modes. The planar shape of a vibrating region 18 including a piezoelectric layer 15 disposed between a pair of conductive layers 14 and 16 is rectangle when viewed in the thickness direction. Outer edges 18a of the vibrating region 18 each have a waveform. The vibrating region 18 includes a peripheral portion 18t extending along the outer edges of the planar shape and having a relatively small thickness; and a central portion 18s extending inside the peripheral portion 18t and having a relatively large thickness.
摘要:
A resonator (300) includes a piezoelectric core (132), a set of electrodes (104, 106, 304, 306), and at least one ground terminal (108, 308). The electrodes are arranged on the piezoelectric core (132) and also includes at least one input electrode (104, 304) having a first width and at least one output electrode having a second width (106, 306) that differs from the first width. The ground terminal (108, 308) is also on the piezoelectric core (132).
摘要:
There is provided a piezoelectric resonator and a piezoelectric thin-film filter including the piezoelectric resonator, the piezoelectric resonator being capable of suppressing long-wavelength spurious modes and short-wavelength spurious modes. The planar shape of a vibrating region 18 including a piezoelectric layer 15 disposed between a pair of conductive layers 14 and 16 is rectangle when viewed in the thickness direction. Outer edges 18a of the vibrating region 18 each have a waveform. The vibrating region 18 includes a peripheral portion 18t extending along the outer edges of the planar shape and having a relatively small thickness; and a central portion 18s extending inside the peripheral portion 18t and having a relatively large thickness.
摘要:
A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cavity and tapered to have an inner angle of 30 degrees or smaller defined by a part of the periphery thereof and a bottom thereof.
摘要:
A volume wave piezoelectric resonator operating at a predetermined frequency comprises a substrate block (4), a carrier having a plane face (16) and a first thickness e1 and consisting of a first material, a resonant plate (6) having a length L, a width I and a second thickness e2, and consisting of a second piezoelectric material, first and second metal electrodes (12, 14) at least partly covering the resonant plate (6) on each side and least partially facing each other. The resonant plate (6) is fixed perpendicularly in the vicinity of the plane face (16) of the substrate block (4) so that the width of the resonant plate (6) and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the substrate block, the length, the width I, the second thickness of the resonant plate are configured for trapping volume waves at the operating frequency of the resonator and for producing a plane-to-plane type volume wave piezoelectric resonator, i.e. with volume waves propagating in the direction of the thickness of the resonant plate.
摘要:
A volume wave piezoelectric and ferroelectric transducer operating at a predetermined frequency f comprises a substrate block (4), having a first thickness e1 and consisting of a first material, and a piezoelectric and ferroelectric transducer plate (6), having a length L, a width I and a second thickness e2, and consisting of a second piezoelectric material, a first and a second metal electrodes (12, 14) covering the piezoelectric transducer plate (6) in the lengthwise direction. The piezoelectric and ferroelectric transducer plate (6) comprises ferroelectric first domains and second domains (17, 18) with alternating polarizations, distributed in the lengthwise direction L of the plate in a periodic pattern of pitch p. The piezoelectric transducer plate (6) is fixed perpendicular to the substrate block (4) such that the width I of the piezoelectric transducer plate (6) and the first thickness e1 of the substrate block (4) are in the same direction. The first material, the second material, the first thickness of the substrate block (4), the length L, the width I, the second thickness e2, the pitch p of the transducer plate (6) are configured for creating and trapping volume waves at the operating frequency of the transducer guided between the two electrodes (12, 14).
摘要:
A piezoelectric thin-film resonator includes a substrate (10), a lower electrode (12) provided on the substrate (10), a piezoelectric film (14) provided on the lower electrode (12), and an upper electrode (16) provided on the piezoelectric film (14) so as to have a portion that overlaps the lower electrode (12) across the piezoelectric film (14). At least a part of an outer end of the piezoelectric film (14) is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film (14).
摘要:
To provide a vibration device in which a decrease in the strength of vibration involved in a reduction in thickness and size less easily occurs. A vibration device 1 includes a first elastic plate 2a including first and second end portions 2a4 and 2a5 and a first planar section 2a1 located between the first and second end portions 2a4 and 2a5, a second elastic plate 2b joined to the second end portion 2a5 side of the first elastic plate 2a, including a second planar section 2b1 opposed to the first planar section 2a1 of the first elastic plate 2a, and having flexural rigidity higher than flexural rigidity of the first elastic plate 2a, a piezoelectric vibrating element 3 provided on a surface on the second elastic plate 2b side in the first planar section 2a1 of the first elastic plate 2a, and a mass adding member 8 attached to the first end portion 2a4 of the first elastic plate 2a.