PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC THIN FILM FILTER
    2.
    发明公开
    PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC THIN FILM FILTER 审中-公开
    PIEZOELEKTRISCHER共振器在PIEZOELEKTRISCHERDÜNNSCHICHTFILTER

    公开(公告)号:EP1887688A1

    公开(公告)日:2008-02-13

    申请号:EP06756514.3

    申请日:2006-05-24

    IPC分类号: H03H9/17 H03H9/58

    摘要: There is provided a piezoelectric resonator and a piezoelectric thin-film filter including the piezoelectric resonator, the piezoelectric resonator being capable of suppressing long-wavelength spurious modes and short-wavelength spurious modes.
    The planar shape of a vibrating region 18 including a piezoelectric layer 15 disposed between a pair of conductive layers 14 and 16 is rectangle when viewed in the thickness direction. Outer edges 18a of the vibrating region 18 each have a waveform. The vibrating region 18 includes a peripheral portion 18t extending along the outer edges of the planar shape and having a relatively small thickness; and a central portion 18s extending inside the peripheral portion 18t and having a relatively large thickness.

    摘要翻译: 提供了一种压电谐振器和包括压电谐振器的压电薄膜滤波器,该压电谐振器能够抑制长波长寄生模式和短波长寄生模式。 包括设置在一对导电层14和16之间的压电层15的振动区域18的平面形状在从厚度方向观察时是矩形。 振动区域18的外缘18a各自具有波形。 振动区域18包括沿着平面形状的外边缘延伸并且具有相对较小厚度的周边部分18t; 以及在周边部分18t内延伸并且具有相对较大厚度的中心部分18s。

    PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC THIN FILM FILTER
    4.
    发明公开
    PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC THIN FILM FILTER 审中-公开
    压电谐振器和薄膜压电FILTER

    公开(公告)号:EP1887688A4

    公开(公告)日:2009-08-05

    申请号:EP06756514

    申请日:2006-05-24

    摘要: There is provided a piezoelectric resonator and a piezoelectric thin-film filter including the piezoelectric resonator, the piezoelectric resonator being capable of suppressing long-wavelength spurious modes and short-wavelength spurious modes. The planar shape of a vibrating region 18 including a piezoelectric layer 15 disposed between a pair of conductive layers 14 and 16 is rectangle when viewed in the thickness direction. Outer edges 18a of the vibrating region 18 each have a waveform. The vibrating region 18 includes a peripheral portion 18t extending along the outer edges of the planar shape and having a relatively small thickness; and a central portion 18s extending inside the peripheral portion 18t and having a relatively large thickness.

    RÉSONATEURS À ONDES DE VOLUME SUR STRUCTURES VERTICALES MICRO-USINÉES
    7.
    发明公开
    RÉSONATEURS À ONDES DE VOLUME SUR STRUCTURES VERTICALES MICRO-USINÉES 审中-公开
    维多利亚州立大学维多利亚州立大学

    公开(公告)号:EP2764617A1

    公开(公告)日:2014-08-13

    申请号:EP12769100.4

    申请日:2012-10-05

    摘要: A volume wave piezoelectric resonator operating at a predetermined frequency comprises a substrate block (4), a carrier having a plane face (16) and a first thickness e1 and consisting of a first material, a resonant plate (6) having a length L, a width I and a second thickness e2, and consisting of a second piezoelectric material, first and second metal electrodes (12, 14) at least partly covering the resonant plate (6) on each side and least partially facing each other. The resonant plate (6) is fixed perpendicularly in the vicinity of the plane face (16) of the substrate block (4) so ​​that the width of the resonant plate (6) and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the substrate block, the length, the width I, the second thickness of the resonant plate are configured for trapping volume waves at the operating frequency of the resonator and for producing a plane-to-plane type volume wave piezoelectric resonator, i.e. with volume waves propagating in the direction of the thickness of the resonant plate.

    摘要翻译: 以预定频率工作的体波压电谐振器包括具有平面,第一厚度并由第一材料构成的衬底块,具有长度,宽度和第二厚度的谐振板,并由第二压电材料构成, 第一和第二金属电极至少部分地覆盖每侧的谐振板并且部分地彼此面对。 谐振板垂直地固定在基板块的平面附近,使得谐振板的宽度和基板块的第一厚度具有相同的方向,并且第一材料,第二材料,第一厚度 基板块的长度,宽度,第二厚度被构造成用于在谐振器的工作频率处捕获体波并且用于产生平面型体积波动压电谐振器。

    Piezoelectric thin-film resonator and filter using the same
    9.
    发明公开
    Piezoelectric thin-film resonator and filter using the same 有权
    PiezoelektrischerDünnschichtresonatorund Filter mit einem solchen Resonator

    公开(公告)号:EP1850478A2

    公开(公告)日:2007-10-31

    申请号:EP07106869.6

    申请日:2007-04-24

    IPC分类号: H03H9/17

    摘要: A piezoelectric thin-film resonator includes a substrate (10), a lower electrode (12) provided on the substrate (10), a piezoelectric film (14) provided on the lower electrode (12), and an upper electrode (16) provided on the piezoelectric film (14) so as to have a portion that overlaps the lower electrode (12) across the piezoelectric film (14). At least a part of an outer end of the piezoelectric film (14) is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film (14).

    摘要翻译: 压电薄膜谐振器包括基板(10),设置在基板(10)上的下电极(12),设置在下电极(12)上的压电薄膜(14)和设置在下电极 在所述压电膜(14)上具有与所述下电极(12)重叠的部分,跨越所述压电膜(14)。 压电薄膜(14)的外端部的至少一部分比在压电薄膜(14)的上下电极重叠的相对区域的外端进一步。

    VIBRATION DEVICE
    10.
    发明公开
    VIBRATION DEVICE 审中-公开
    振动装置

    公开(公告)号:EP3320987A1

    公开(公告)日:2018-05-16

    申请号:EP17743969.2

    申请日:2017-01-13

    IPC分类号: B06B1/06

    摘要: To provide a vibration device in which a decrease in the strength of vibration involved in a reduction in thickness and size less easily occurs. A vibration device 1 includes a first elastic plate 2a including first and second end portions 2a4 and 2a5 and a first planar section 2a1 located between the first and second end portions 2a4 and 2a5, a second elastic plate 2b joined to the second end portion 2a5 side of the first elastic plate 2a, including a second planar section 2b1 opposed to the first planar section 2a1 of the first elastic plate 2a, and having flexural rigidity higher than flexural rigidity of the first elastic plate 2a, a piezoelectric vibrating element 3 provided on a surface on the second elastic plate 2b side in the first planar section 2a1 of the first elastic plate 2a, and a mass adding member 8 attached to the first end portion 2a4 of the first elastic plate 2a.

    摘要翻译: 提供一种振动装置,其中容易引起减小厚度和尺寸的振动强度降低。 振动装置1包括:第一弹性板2a,其包括第一端部2a4和第二端部2a5以及位于第一端部2a4和第二端部2a5之间的第一平面部2a1;第二弹性板2b,其与第二端部2a5侧 包括与第一弹性片2a的第一平面部2a1对置且具有比第一弹性片2a的弯曲刚性高的弯曲刚性的第二平面部2b1的第一弹性片2a;设置在第一弹性片2a上的压电振动元件3 第一弹性板2a的第一平面部分2a1中的第二弹性板2b侧上的表面以及附接到第一弹性板2a的第一端部2a4的质量添加部件8。