公开(公告)号：EP1361610B1

公开(公告)日：2011-11-30

申请号：EP02715811.2

申请日：2002-01-18

申请人： KABUSHIKI KAISHA WATANABE SHOKO ,  Toda, Masayuki

发明人： Toda, Masayuki ,  Kusuhara, Masaki c/o KABUSHIKI KAISHA WATANABE SHOKO ,  UMEDA, Masaru c/o KABUSHIKI KAISHA WATANABE SHOKO ,  FUKAGAWA, Mitsuru, c/o WACOM ELECTRIC CO., LTD

IPC分类号： H01L23/31 ,  C23C16/40 ,  B01B1/00 ,  B01F3/04 ,  B01D1/16

CPC分类号： H01L27/11502 ,  B01B1/005 ,  B01D3/346 ,  B01F3/04021 ,  B01F5/0646 ,  B01F5/0653 ,  B01F5/0656 ,  B01F5/0671 ,  B01F5/0676 ,  C23C16/40 ,  C23C16/409 ,  C23C16/4486 ,  H01L21/31691 ,  H01L27/11507 ,  H01L28/55 ,  Y10S261/65

摘要： A carburetor usable for long period without causing a clogging and capable of stably feeding raw material to a reaction part, comprising a diffusion part (8) having a gas passage (2) formed inside a diffusion part body (1), a gas inlet (4) for leading pressurized carrier gas (3) into the gas passage (2), a means (6) for feeding raw material solution (5) into the carrier gas passing through the gas passage (2), a gas outlet (7) for feeding the carrier gas including the diffused raw material solution (5) to a vaporization part (22), and a means (18) for cooling the carrier gas flowing through the inside of the gas passage (2), and a radiation prevention part (102) having a vaporization tube (20) connected to the reaction part of a device and the gas outlet (7) of the diffusion part (8), a heater (21) for heating the vaporization tube (20), a vaporization part (22) for heating and vaporizing the carrier gas having raw material solution distributed therein, and a small hole (101) provided on the outside of the gas outlet (7).