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1.发明公开IMPROVED METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT CELL RE-USE 审中-公开VERBSSERTE基于测量的前馈饲料侧身测量单元复用的用途
公开(公告)号：EP2311079A4
公开(公告)日：2013-02-20
申请号：EP09800821
申请日：2009-07-16
Applicant: KLA TENCOR CORP
Inventor： ADEL MICHAEL E , POSLAVSKY LEONID , FIELDEN JOHN , MADSEN JONATHAN MICHAEL , PETERS ROBERT
IPC: H01L21/66
CPC classification number: H01L22/12 , H01L22/20 , H01L22/30 , H01L2924/0002 , H01L2924/00
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