Patent search ap:("KLA TENCOR TECH CORP") AND inv:"KANDEL DANIEL" Page 1

1.

发明公开
CONTINUOUSLY VARYING OFFSET MARK AND METHODS OF DETERMINING OVERLAY 审中-公开
Title translation: 连续变化的偏移标记和方法用于确定OVERLAY

公开(公告)号：EP1716389A4

公开(公告)日：2011-08-03

申请号：EP05723303

申请日：2005-02-17

Applicant: KLA TENCOR TECH CORP

Inventor： ADEL MICHAEL E , SELIGSON JOEL L , KANDEL DANIEL

IPC: G01B11/00 , G03F7/00 , G03F7/20 , H01L21/66 , H01L21/76 , H01L23/544

CPC classification number: G03F7/70683 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/70633 , H01L22/12

2.

发明公开
METHODS AND APPARATUS FOR DESIGNING AND USING MICRO-TARGETS IN OVERLAY METROLOGY 有权
Title translation: 方法和设备的设计和在重叠度量衡采用微TARGETS

公开(公告)号：EP1946372A4

公开(公告)日：2011-01-05

申请号：EP06817348

申请日：2006-10-23

Applicant: KLA TENCOR TECH CORP

Inventor： LEVINSKI VLADIMIR , ADEL MICHAEL E , FROMMER AVIV , KANDEL DANIEL

IPC: G06F17/50 , G03F7/20

CPC classification number: H01L23/544 , G03F7/70633 , H01L22/12 , H01L2223/54453 , H01L2223/5448 , H01L2924/0002 , H01L2924/00

3.

发明公开
MEASURING OVERLAY AND PROFILE ASYMMETRY USING SYMMETRIC AND ANTI-SYMMETRIC SCATTEROMETRY SIGNALS 审中-公开
Title translation: 叠加，PROFILE非对称性测量使用平衡和抗平衡扩频测量信号

公开(公告)号：EP1896811A4

公开(公告)日：2012-03-28

申请号：EP06772390

申请日：2006-06-06

Applicant: KLA TENCOR TECH CORP

Inventor： KANDEL DANIEL , GROSS KEN , FRIEDMANN MICHAEL , FU JIYOU , KRISHNAN SHANKAR , GOLOVANEVSKY BORIS

IPC: G01J4/00 , G01N21/21 , G01N21/95 , G03F7/20

CPC classification number: G01N21/211 , G01N21/9501 , G01N21/956 , G03F7/70633

Patent Agency Ranking