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1.发明公开MEASURING OVERLAY AND PROFILE ASYMMETRY USING SYMMETRIC AND ANTI-SYMMETRIC SCATTEROMETRY SIGNALS 审中-公开叠加，PROFILE非对称性测量使用平衡和抗平衡扩频测量信号
公开(公告)号：EP1896811A4
公开(公告)日：2012-03-28
申请号：EP06772390
申请日：2006-06-06
Applicant: KLA TENCOR TECH CORP
Inventor： KANDEL DANIEL , GROSS KEN , FRIEDMANN MICHAEL , FU JIYOU , KRISHNAN SHANKAR , GOLOVANEVSKY BORIS
CPC classification number: G01N21/211 , G01N21/9501 , G01N21/956 , G03F7/70633
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