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公开(公告)号:EP3117495A4
公开(公告)日:2017-11-29
申请号:EP15809376
申请日:2015-06-18
申请人: KLA-TENCOR CORP
发明人: CHUANG YUNG-HO ALEX , LOIU JUSTIN DIANHUAN , LU XIAOXU , ARMSTRONG J JOSEPH , DENG YUJUN , FIELDEN JOHN
CPC分类号: H01S3/10046 , G03F7/70025 , H01S3/005 , H01S3/0071 , H01S3/08004 , H01S3/08054 , H01S3/08059 , H01S3/083 , H01S3/10 , H01S3/10061 , H01S2301/20 , H01S2301/203 , H01S2301/206
摘要: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.