-
公开(公告)号:EP2118940A4
公开(公告)日:2011-03-09
申请号:EP08723365
申请日:2008-03-07
发明人: YOUM DO-JUN , YOO JA-EUN , LEE BYOUNG-SU , LEE SANG-MOO , JUNG YE-HYUN , LEE JAE-YOUNG
IPC分类号: H01L39/24
CPC分类号: H01L39/2432 , C23C14/562 , H01L39/24
摘要: Provided is an apparatus for continuously fabricating superconducting tapes. An evaporation using drum in dual chamber (EDDC) method is suitable for mass production of high-temperature superconducting tapes. However, the EDDC method is limited to fabrication of high-temperature superconducting tapes having a limited length. In an attempt, high-temperature super-conducting tapes having a sufficiently large length can be fabricated using the EDDC method by releasing a long high-temperature superconducting tape from one reel and winding the long high-temperature superconducting tape around the other reel. In this case, it is important to stably move a high-temperature superconducting tape spirally wound around a drum from one reel to the other reel. Therefore, the provided apparatus uses endless tract belts separately disposed around a drum to stably and continuously move a high-temperature superconducting tape spirally wound around the drum along the centerline of the drum from one reel to the other reel.