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公开(公告)号：EP4187201A1
公开(公告)日：2023-05-31
申请号：EP22186075.2
申请日：2022-07-20
发明人： GANDO, Ryunosuke , ONO, Daiki , TOMIZAWA, Yasushi , MIYAZAKI, Fumito , KAJI, Shiori , MASUNISHI, Kei , HIRAGA, Hiroki , OGAWA, Etsuji , UCHIDA, Kengo
IPC分类号： G01C19/5642 , G01C19/5712 , G01C19/5776
摘要： According to one embodiment, a sensor includes a sensor element, a housing provided around the sensor element, and a processor. The sensor element includes a base body including first and second base body regions, and first and second sensor parts. The first sensor part is provided in the first base body region, and includes a first sensor movable part. The second sensor part is provided in the second base body region and includes first and second beams. The processor can derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part. The processor can detect acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam. The processor can correct one of the rotation angle or the angular velocity based on one of the temperature or the acceleration.
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公开(公告)号：EP4242667A1
公开(公告)日：2023-09-13
申请号：EP22190796.7
申请日：2022-08-17
发明人： MASUNISHI, Kei , TOMIZAWA, Yasushi , OGAWA, Etsuji , GANDO, Ryunosuke , KAJI, Shiori , HIRAGA, Hiroki , MIYAZAKI, Fumito , ONO, Daiki , UCHIDA, Kengo
IPC分类号： G01P15/125 , G01P15/097 , G01P15/08 , G01C19/5719
摘要： According to one embodiment, a sensor includes a first detection element, and a controller. The first detection element includes a base body, a first support portion, a first movable member, a first detection electrode, and a first counter detection electrode. The first support portion is fixed to the base body. The first movable member is supported by the first support portion. The first detection electrode and the first counter detection electrodes are fixed to the base body. The first movable member includes a first movable portion. The first movable portion includes a first beam, a first conductive extending portion, and a first connecting portion. The first conductive extending portion includes a first extending portion, a first extending other portion, and a first extending intermediate. The first extending portion is between the first detection electrode and the first counter detection electrodes. The controller includes a first differential circuit.
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公开(公告)号：EP4145139A1
公开(公告)日：2023-03-08
申请号：EP22156297.8
申请日：2022-02-11
发明人： MASUNISHI, Kei , TOMIZAWA, Yasushi , OGAWA, Etsuji , GANDO, Ryunosuke , KAJI, Shiori , HIRAGA, Hiroki , MIYAZAKI, Fumito , ONO, Daiki , UCHIDA, Kengo
IPC分类号： G01P15/097 , G01P15/125 , G01P15/08
摘要： According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.
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公开(公告)号：EP4431448A1
公开(公告)日：2024-09-18
申请号：EP23192001.8
申请日：2023-08-17
发明人： MASUNISHI, Kei , OGAWA, Etsuji , TOMIZAWA, Yasushi , MIYAZAKI, Fumito , ONO, Daiki , UCHIDA, Kengo , OGAWA, Jumpei , ISHIBASHI, Fumitaka , MURASE, Hideaki
IPC分类号： B81B3/00 , G01P15/125
CPC分类号： B81B2201/023520130101 , B81B2203/05120130101 , B81B2203/0420130101 , B81B3/0037 , B81B2203/05620130101 , G01P15/097
摘要： According to one embodiment, a sensor includes a first beam, a first opposing beam, a support portion, a first linking portion, and a first connecting portion. The first beam includes a first portion and a first other portion. A direction from the first portion to the first other portion is along a first direction. A second direction from the first opposing beam to the first beam crosses the first direction. The first opposing beam includes a first opposing portion and a first other opposing portion. The first linking portion is connected to the first other portion and the first other opposing portion. The first connecting portion is connected to the first linking portion. A first connecting portion width along the second direction of the first connecting portion is narrower than a first linking portion width along the second direction of the first linking portion.
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公开(公告)号：EP4431447A1
公开(公告)日：2024-09-18
申请号：EP23189874.3
申请日：2023-08-04
发明人： MASUNISHI, Kei , OGAWA, Etsuji , TOMIZAWA, Yasushi
IPC分类号： B81B3/00 , G01P15/097
CPC分类号： B81B2201/023520130101 , B81B3/0094 , B81B2203/016320130101 , G01P15/097 , G01P2015/082820130101 , G01P15/125
摘要： According to one embodiment, a sensor includes an element section. The element section includes a first beam, a first beam electrode, a second beam, and a second beam electrode. The first beam includes a first portion, a first other portion, and a first intermediate portion between the first portion and the first other portion. The first beam electrode is connected to the first intermediate portion. The second beam includes a second portion, a second other portion, and a second intermediate portion between the second portion and the second other portion. The second beam electrode is connected to the second intermediate portion. The first and the second beam electrodes satisfy at least one of first to eighth conditions.
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公开(公告)号：EP4397944A1
公开(公告)日：2024-07-10
申请号：EP23192529.8
申请日：2023-08-21
IPC分类号： G01C19/5733 , G01C19/5769 , G01C19/5783 , G01P15/097 , H03H3/00
CPC分类号： G01P15/097 , G01C19/5769 , G01C19/5733 , G01C19/5783 , H03H3/00
摘要： According to one embodiment, a sensor includes a housing, a sensor section, and a plurality of first fixing members. The housing includes a housing base. The sensor section is surrounded by the housing. The sensor section includes a sensor base, a support portion fixed to the sensor base, a movable portion supported by the support portion, and a plurality of fixed electrodes fixed to the sensor base and facing the movable portion. A first gap is provided between the sensor base and the movable portion. The fixed electrodes are provided in n-rotational symmetry in a first plane perpendicular to a first direction from the sensor base to the support portion. The n is an integer of 2 or more. The plurality of first fixing members fix the sensor base to the housing base. The first fixing members are provided in the n-rotational symmetry in the first plane.
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