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公开(公告)号：EP4187724A1
公开(公告)日：2023-05-31
申请号：EP21211527.3
申请日：2021-11-30
IPC分类号： H01S3/03 , H01S3/038 , H01S3/041 , H01S3/0975 , H01S3/04 , H01S3/0971 , H01S3/223 , H01S3/097
摘要： A radio frequency, RF, slab laser comprising a live electrode (102) and a ground electrode (108) whose inwardly facing surfaces face each other to form a gap for forming a plasma discharge when the live electrode is supplied with a suitable RF drive signal. The electrodes are enclosed in a vacuum space by a vacuum housing (114) with an access aperture (116). The access aperture is sealed with a vacuum flange (70) that comprises an electrically insulating connector. A plurality of hollow conductors (62) are arranged to extend through the vacuum flange into the vacuum space and connect with the live electrode. The hollow conductors connect to the live electrode to supply it with its RF drive signal and also coolant fluid which is distributed through fluid circulation channels (80a, 80b). Coolant fluid is supplied to the live electrode through certain ones of the hollow conductors and taken out by others.
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公开(公告)号：EP4376235A3
公开(公告)日：2024-09-04
申请号：EP24170103.6
申请日：2021-11-30
IPC分类号： H01S3/03 , H01S3/038 , H01S3/041 , H01S3/0975 , H01S3/04 , H01S3/0971 , H01S3/223 , H01S3/097
CPC分类号： H01S3/0315 , H01S3/041 , H01S3/038 , H01S3/0407 , H01S3/2232 , H01S3/0971 , H01S3/09702
摘要： A radio frequency, RF, slab laser comprising a live electrode (102) and a ground electrode (108) whose inwardly facing surfaces face each other to form a gap for forming a plasma discharge when the live electrode is supplied with a suitable RF drive signal. The electrodes are enclosed in a vacuum space by a vacuum housing (114) with an access aperture (116). The access aperture is sealed with a vacuum flange (70) that comprises an electrically insulating connector. A plurality of hollow conductors (62) are arranged to extend through the vacuum flange into the vacuum space and connect with the live electrode. The hollow conductors connect to the live electrode to supply it with its RF drive signal and also coolant fluid which is distributed through fluid circulation channels (80a, 80b). Coolant fluid is supplied to the live electrode through certain ones of the hollow conductors and taken out by others.
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公开(公告)号：EP4376235A2
公开(公告)日：2024-05-29
申请号：EP24170103.6
申请日：2021-11-30
IPC分类号： H01S3/0971
CPC分类号： H01S3/0315 , H01S3/041 , H01S3/038 , H01S3/0407 , H01S3/2232 , H01S3/0971 , H01S3/09702
摘要： A radio frequency, RF, slab laser comprising a live electrode (102) and a ground electrode (108) whose inwardly facing surfaces face each other to form a gap for forming a plasma discharge when the live electrode is supplied with a suitable RF drive signal. The electrodes are enclosed in a vacuum space by a vacuum housing (114) with an access aperture (116). The access aperture is sealed with a vacuum flange (70) that comprises an electrically insulating connector. A plurality of hollow conductors (62) are arranged to extend through the vacuum flange into the vacuum space and connect with the live electrode. The hollow conductors connect to the live electrode to supply it with its RF drive signal and also coolant fluid which is distributed through fluid circulation channels (80a, 80b). Coolant fluid is supplied to the live electrode through certain ones of the hollow conductors and taken out by others.
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