公开(公告)号：EP0631712A1

公开(公告)日：1995-01-04

申请号：EP93906431.0

申请日：1993-03-18

申请人： Kernforschungszentrum Karlsruhe GmbH

发明人： SCHULTHEISS, Christoph ,  KONIJNENBERG, Martin ,  SCHWALL, Markus

IPC分类号： H01J37 ,  H05H1 ,  H05H5

CPC分类号： H05H1/06 ,  H05H5/00

摘要： A process for accelerating electrically charged particles and a particle accelerator for applying the process are diclosed. The beam thus generated has a high degree of intensity and convergence and is suitable for uniformly depositing a material on a substrate. Similarly, it is useful for generating light of different spectral regions.