公开(公告)号：EP2810244A1

公开(公告)日：2014-12-10

申请号：EP13743326.4

申请日：2013-02-01

申请人： Kla-Tencor Corporation

发明人： BROWN, David L. ,  KERMAT, Mansour ,  GLASSER, Lance ,  NIELSEN, Henrik ,  ZHENG, Guowu ,  LEHMAN, Kurt ,  HATCH, Kenneth ,  CHUANG, Alex ,  IYER, Venkatraman

IPC分类号： G06T1/00 ,  G06T7/00

CPC分类号： H04N5/378 ,  H01L27/14634 ,  H04N5/3694 ,  H04N5/37206 ,  H04N5/37213

摘要： A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of high density digitizers (HDDs) for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an analog front end (AFE) for conditioning a signal representing one sensor analog output, an analog-to-digital converter (ADC) for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.