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公开(公告)号:EP0953166B1
公开(公告)日:2001-08-16
申请号:EP98932356.3
申请日:1998-07-02
发明人: McCULLOUGH, Christopher, David, 8 Pasture Close , RAY, Kevin, Barry, 30 Chalner Close , MONK, Alan, Stanley, Victor , BAYES, Stuart, 10 Chatsworth Mews , KITSON, Anthony, Paul
IPC分类号: G03F7/023
CPC分类号: G03F7/2022 , B41C1/1008 , B41C2210/02 , B41C2210/06 , B41C2210/14 , B41C2210/22 , B41C2210/262 , B41M5/368 , B41M5/465 , G03F7/022 , G03F7/023 , G03F7/0233 , H05K3/0082
摘要: A method for producing a predetermined resist pattern on e.g. a lithographic printing plate, circuit board or mask comprises the imagewise exposure of a radiation sensitive diazide-containing coating (conventionally considered as a UV sensitive material), to non-UV radiation, such as direct heat radiation or infra-red radiation. A positive of the exposed image is revealed on development. Additionally, it has been found that a flood exposure to UV radiation after the imagewise exposure to the non-UV radiation means that a negative of the exposed image is revealed, on development.