FOCUS-LESS INSPECTION APPARATUS AND METHOD
    2.
    发明公开

    公开(公告)号:EP4354081A2

    公开(公告)日:2024-04-17

    申请号:EP24159565.1

    申请日:2019-10-14

    IPC分类号: G01B11/25

    摘要: The present disclosure proposes an inspection apparatus. The inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.

    INSPECTION DEVICE
    4.
    发明公开
    INSPECTION DEVICE 审中-公开

    公开(公告)号:EP3712554A1

    公开(公告)日:2020-09-23

    申请号:EP18879378.0

    申请日:2018-11-15

    IPC分类号: G01B11/24 G01B11/16

    摘要: An inspection apparatus for inspecting the appearance of an inspection target object is provided. The inspection apparatus according to one embodiment of the present disclosure includes a support part configured to hold an inspection target object such that a side surface of the inspection target object faces a predetermined direction, a light source configured to irradiate light toward the inspection target object, a diffusion reflector configured to diffusely reflect at least a part of the irradiated light to irradiate the reflected light to the side surface of the inspection target object, and at least one inspection part configured to inspect the inspection target object by receiving the light reflected from the inspection target object and the diffusion reflector.

    FOCUS-LESS INSPECTION APPARATUS AND METHOD
    5.
    发明公开

    公开(公告)号:EP3640629A1

    公开(公告)日:2020-04-22

    申请号:EP19203002.1

    申请日:2019-10-14

    摘要: The present disclosure proposes an inspection apparatus. The inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.