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公开(公告)号：EP3489620A1
公开(公告)日：2019-05-29
申请号：EP18208784.1
申请日：2018-11-28
发明人： Young Joo, HONG , HONG, Deok Hwa , KIM, Min Kyu , CHOI, Jeong Hun
摘要： A substrate inspection apparatus is disclosed. The substrate inspection apparatus according to the present disclosure may include: a light source configured to radiate laser light onto a coated film that is spread on a region of a substrate; a light detector configured to obtain optical interference data on an interference between reference light, that is generated by the laser light being reflected from a surface of the coated film, and measurement light, that is generated by the laser light penetrating the coated film and being scattered; and a processor configured to derive a thickness of the coated film corresponding to the region, based on the optical interference data.
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