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公开(公告)号：EP1952517A1
公开(公告)日：2008-08-06
申请号：EP06831882.3
申请日：2006-11-14
CPC分类号： H02K41/033 , H02K21/04
摘要： A linear VR motor or actuator having band coils is provided. The VR actuator includes a first core dimensioned as either a single 'E' or a double 'E'. Each center protruding bar may be capped with a permanent magnet made of a Ferro-magnetic material or ceramic magnetic material for preloading the actuator, which is advantageous from controllability point of view, and enables the actuator to counteract gravitational load without nominal current through the wires. The first core is also formed of a Ferro magnetic material. The spaces between the protruding bars are filled with band coils arranged parallel to the protruding bars and electrically conductive. An I-core of Ferro- magnetic material is positioned perpendicular to the protruding bars. A current induced in the band coils controllably amplifies or negates a magnetic flux produced by the permanent magnets. Different shapes (e.g. circular shapes) for the I-core (e.g. being part of a circular axis) and the opposite part of the E-core may be used.
摘要翻译： 提供具有带状线圈的线性VR马达或致动器。 VR执行器包括一个尺寸为单个'E'或双'E'的第一个铁芯。 每个中心突出杆可以用由铁磁材料或陶瓷磁性材料制成的永磁体覆盖，用于预加载致动器，这从可控性的角度来看是有利的，并且使得致动器能够抵消重力负载而没有通过电线的额定电流 。 第一个铁芯也由铁磁材料构成。 突条之间的空间填充有平行于突条并且导电的带状线圈。 铁磁材料的I型核心垂直于突出棒定位。 在带状线圈中感应的电流可控制地放大或消除由永磁体产生的磁通量。 可以使用用于I芯（例如，作为圆形轴的一部分）的不同形状（例如圆形）和E芯的相对部分。
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公开(公告)号：EP2132600A1
公开(公告)日：2009-12-16
申请号：EP08719741.4
申请日：2008-03-17
IPC分类号： G03F7/20 , B23Q1/62 , H01L21/687
CPC分类号： G03F7/70716 , H01L21/682 , H01L21/68764
摘要： A stage assembly (8) includes a first stage (10) having at least one degree of freedom, i.e. at least one long stroke motion capability, and being movably mounted in a first stage base frame (12), the first stage base frame permitting motion in a first direction. A second stage (20) has at least one degree of freedom, i.e. at least one long stroke motion capability, and being movably mounted in a second stage base frame (22). The second stage base frame permitting motion in a second direction which is different from the first direction. The first stage and the second stage are located one over the other in a third direction which is orthogonal the first and second directions and a motion. An isolated reference metrology frame (18) is configured to provide a point of reference for the first and second stages in one or more degrees of freedom. Other degrees of freedom may be measured more directly from one stage relative to the other.
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公开(公告)号：EP2132600B1
公开(公告)日：2012-01-04
申请号：EP08719741.4
申请日：2008-03-17
IPC分类号： G03F7/20 , B23Q1/62 , H01L21/687
CPC分类号： G03F7/70716 , H01L21/682 , H01L21/68764
摘要： A stage assembly (8) includes a first stage (10) having at least one degree of freedom, i.e. at least one long stroke motion capability, and being movably mounted in a first stage base frame (12), the first stage base frame permitting motion in a first direction. A second stage (20) has at least one degree of freedom, i.e. at least one long stroke motion capability, and being movably mounted in a second stage base frame (22). The second stage base frame permitting motion in a second direction which is different from the first direction. The first stage and the second stage are located one over the other in a third direction which is orthogonal the first and second directions and a motion. An isolated reference metrology frame (18) is configured to provide a point of reference for the first and second stages in one or more degrees of freedom. Other degrees of freedom may be measured more directly from one stage relative to the other.
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