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公开(公告)号:EP0636877A1
公开(公告)日:1995-02-01
申请号:EP94305573.1
申请日:1994-07-28
申请人: LECO CORPORATION
CPC分类号: H01J49/105 , G01N21/68
摘要: A non-conductive isolator (10) for supporting a sample (137) to be analyzed by radio frequency energy induced glow discharge techniques has a conductive ring (19) for coupling a source of radio frequency energy to the same surface of the sample which is in direct contact with the induced glow discharge. An adapter kit for converting a direct current glow discharge analysis apparatus to a radio frequency energy induced flow discharge is described as well as the method of analysing non-conductive and conductive samples using a source of RF energy coupled to the same sample surface being analyzed.
摘要翻译: 用于支持通过射频能量感应辉光放电技术分析的样品(137)的非导电隔离器(10)具有用于将射频能源耦合到样品的相同表面的导电环(19),该导电环 与感应辉光放电直接接触。 描述了用于将直流辉光放电分析装置转换为射频能量感应流放电的适配器套件,以及使用耦合到正在分析的相同样品表面的RF能量源分析非导电和导电样品的方法。
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公开(公告)号:EP0636877B1
公开(公告)日:2002-02-27
申请号:EP94305573.1
申请日:1994-07-28
申请人: LECO CORPORATION
CPC分类号: H01J49/105 , G01N21/68
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