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公开(公告)号:EP1253817A3
公开(公告)日:2003-07-09
申请号:EP02008778.9
申请日:2002-04-19
申请人: LICONIC AG
发明人: Malin, Cosmas , Amann, Joachim
CPC分类号: H01L21/67259 , H01L21/681
摘要: The invention relates to an apparatus for picking and placing small objects. It is equipped with a tool holder (222) that can be positioned in an X-, Y- and Z-direction. A pickup tool (401) is mounted to the tool holder and can be rotated about a vertical axis. A microscopic and a macroscopic camera (301, 303) with non-parallel axes are arranged on the tool holder for viewing the objects from above, and a lookup camera (506) is provided to view the objects from below. The housing (1) of the apparatus as well as a first movable frame (20) are formed by perpendicular walls (101, 102, 103, 201a - 201e), which are light but provide stability for placing the tools accurately. An object dispenser (601) is located below a transfer opening (505) of a working platform (501) of the apparatus for quick access to new objects. A control unit (7) provides a graphical user interface for controlling the operation of the apparatus.