Hybrid electro-optic device with combined mirror arrays
    1.
    发明公开
    Hybrid electro-optic device with combined mirror arrays 审中-公开
    Elektrooptische Hybridvorrichtung mit Spiegelanordnung

    公开(公告)号:EP1093004A2

    公开(公告)日:2001-04-18

    申请号:EP00308118.9

    申请日:2000-09-18

    IPC分类号: G02B26/08 B81B3/00

    摘要: An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.

    摘要翻译: 光信号处理装置包括安装在彼此靠近的基座的上表面上的至少两个反射镜阵列芯片,以形成复合阵列。 每个反射镜阵列芯片包括衬底和安装在衬底的上表面上的多个间隔开的反射镜。 反射镜响应于电信号而是可移动的。 用于将电信号传导到反射镜的多个电引线,至少一部分电引线至少部分地沿着基底的上表面延伸到基底的下表面和基底的上表面之间。