专利检索 ap:("Lam Research Corporation") AND inv:"KOLLRACK, Marc" 第 1 页

1.

发明公开
SHOWERHEAD TEMPERATURE BASED DEPOSITION TIME COMPENSATION FOR THICKNESS TRENDING IN PECVD DEPOSITION SYSTEM 审中-实审

公开(公告)号：EP4373992A1

公开(公告)日：2024-05-29

申请号：EP22846439.2

申请日：2022-07-15

申请人： Lam Research Corporation

发明人： WANG, Dong , HONG, Tu , SHEN, Wenjia , KANG, Hu , KOLLRACK, Marc , MULLENAUX, Sky

IPC分类号： C23C16/52 , C23C16/455

CPC分类号： C23C16/52 , C23C16/45565 , C23C16/4557 , H01J37/3244 , H01J37/32522 , H01J37/32935 , H01J37/3299