摘要:
To manufacture a coil component having a high-aspect conductive pattern. A method for manufacturing a coil element being characterized by comprising: forming a groove in a substrate surface of a resin substrate; forming a metallic coating; forming a resist pattern being a reverse pattern of a coil element pattern on the substrate surface to sandwich the groove, so as to have a desired thickness T; forming a central conductive film of the coil element on the substrate surface including the groove, by a first electroforming with the resist pattern as a mask, so as to have a height t equal to or less than the desired thickness T; removing the resist pattern and the exposed metallic coating; forming a surface conductive film by a second electroforming with the central conductive film as a foundation, to form a coil element made of the central conductive film and surface conductive film; peeling away the coil element from the resin substrate; and removing a portion formed in the groove, of the central conductive film of the peeled coil element by reverse electrolytic etching.
摘要:
A transfer mold, which has superior durability and high aspect ratio, for production of a component by electroplating and a component produced thereby are provided. A method therefor includes the steps of: forming a resist pattern having a shape of a component with a desired aspect ratio on a metal substrate 10, a sidewall of the resist pattern forming a desired angle α; creating a transfer mold by filing up the resist pattern having the shape of the component by electroplating to a predetermined thickness; and providing a master mold 20 by separating the transfer mold from the metal substrate.
摘要:
A multi-stage transfer mold manufacturing method that can save labor in a step of connecting by a multi-stage connection, a multi-stage transfer mold manufactured thereby, and a component produced thereby are provided for production of a multi-stage component by electroplating. A method therefor includes the steps of: forming a resist pattern having a shape of a component with a desired aspect ratio on a metal substrate, a sidewall of the resist pattern forming a desired angle α; forming, on the resist pattern, a resist pattern having a shape and a thickness of a connection pillar for connecting with an upper layer; creating a transfer mold by filling up the resist pattern on which the resist pattern having the shape of the connection pillar by electroplating to a predetermined thickness; and providing a master mold by separating the transfer mold from the metal substrate.
摘要:
A coil component is produced without using an insulating substrate. A method for producing a coil element by using a transfer mold is provided which includes a step of preparing a transfer mold having an inverse coil element pattern etched thereon, a step of forming a peel-away film and an insulating film on the surface of the transfer mold in a superimposed manner, a step of forming a resist film in an area having no inverse coil element pattern formed therein on the insulating film, a step of removing by etching the insulating film with the resist film as a mask, a step of after removing the resist film, filling up an area having the inverse coil element pattern formed therein and forming a central conductive film by first electroplating so as to slightly protrude above the insulating film, a step of peeling the central conductive film from the transfer mold, and a step of forming a surface conductive film by second electroplating with the central conductive film as a foundation and forming a coil element comprised of the central conductive film and the surface conductive film.
摘要:
Provided is a method for manufacturing a coil element, which does not adversely affect the coil element pattern after taking out for use. A method for manufacturing a coil element using a transferring mold, includes: preparing a transferring mold, on a surface of which an inverted coil element pattern is engraved, the transferring mold having at least a surface part made of metal; forming a center conductive film by first electroplating at the transferring mold as a whole so as to have a thickness exceeding a thickness of an area where the inverted coil element pattern is engraved; removing the center conductive film from a surface by a predetermined thickness by polishing or grinding so as to flatten the surface of the center conductive film; releasing the flattened center conductive film from the transferring mold; coating a protective film at a surface as a whole of the released center conductive film on a side where the coil element pattern is formed; etching the center conductive film for removal from the side subjected to the flattening so that the side reaches the protective film; and removing the protective film and taking out the center conductive film.
摘要:
Provided is a method for manufacturing a coil element, capable of manufacturing a coil element using a resin mold and without performing releasing and transferring, and capable of thinning the coil element. A method for manufacturing a coil element using a resin mold that is soluble in organic solvent, includes: preparing a resin mold, on a surface of which an inverted coil element pattern is engraved; forming a metal seed film on the surface of the resin mold; removing the metal seed film in an area where the inverted coil element pattern is not formed; forming a center conductive film so as to fill an area where the inverted coil element pattern is engraved by first electroplating while using the metal seed film as a base; and dissolving the resin mold to take out the center conductive film.
摘要:
A transfer mold that is used in production of a component by electroplating and has high workability and superior durability as well as a component produced thereby are provided. A method therefor includes the steps of: forming a pattern of a desired component by providing a reverse pattern of the pattern of the desired component on a metal substrate 10 and etching the metal substrate 10 using the reverse pattern as a mask; and treating the reverse pattern with heat or removing the reverse pattern and forming an insulation layer 30, 50 in a portion where the reverse pattern has been removed.