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    AN APPARATUS AND METHOD FOR REGULATING A PRESSURE IN A CHAMBER
    1.
    发明公开
    AN APPARATUS AND METHOD FOR REGULATING A PRESSURE IN A CHAMBER 失效
    调节室内压力的装置和方法

    公开(公告)号：EP0996877A1

    公开(公告)日：2000-05-03

    申请号：EP98936377.5

    申请日：1998-06-20

    申请人： Leybold Vakuum GmbH ,  Applied Materials

    发明人： BEYER, Christian ,  GREGOR, Mariusch ,  STOLLE, Robert ,  BAHNEN, Rudolf ,  PLUGGE, Anja ,  FRINGS, Heinz ,  RONTHALER, Karl-Heinz ,  SMITH, Dennis ,  PATEL, Jayesh ,  TRENTON, Keith

    IPC分类号： G05D16/20 ,  F04B41/06

    CPC分类号： G05D16/208 ,  F04B49/08 ,  F04B2203/0204 ,  F04B2205/172 ,  F04D19/04 ,  F04D25/16 ,  F04D27/0253 ,  F04D27/0269 ,  Y10S137/907 ,  Y10T137/0396 ,  Y10T137/7761

    摘要： A pressure for a chamber is regulated by controlling either the exhaust pressure at the exhaust side of a first vacuum pump or the internal pressure at a compression stage of the first vacuum pump, where the first vacuum pump is directly communicating with the chamber. The pressure of the chamber can be regulated by combinations of the following: controlling the variable rotational frequency of a roots vacuum pump, a pre-vacuum pump, or a high compression pump; controlling a control valve between a pre-vacuum pump and the first vacuum pump; controlling a control valve for injecting gas into the exhaust side of the first vacuum pump or into the compression stage of the first vacuum pump; and controlling a control valve or control valves for bypassing the first vacuum pump or a compression stage or compression stages of the first vacuum pump. To regulate the pressure in the chamber, several types of control rules can be used, including: a PID control rule, a gain scheduler, and a threshold comparison control rude.

    摘要翻译： 通过控制第一真空泵的排气侧的排气压力或第一真空泵的压缩阶段的内部压力来调节腔室的压力，其中第一真空泵直接与腔室连通。 腔室的压力可通过以下组合来调节：控制罗茨真空泵，预真空泵或高压缩泵的可变旋转频率; 控制预真空泵和第一真空泵之间的控制阀; 控制用于将气体喷射到所述第一真空泵的所述排气侧或所述第一真空泵的所述压缩级中的控制阀; 以及控制用于绕过第一真空泵或第一真空泵的压缩级或压缩级的一个或多个控制阀。 为了调节室内的压力，可以使用几种控制规则，包括：PID控制规则，增益调度器和阈值比较控制粗鲁。

    VAKUUMLEITUNG
    2.
    发明公开
    VAKUUMLEITUNG 有权
    真空管道

    公开(公告)号：EP1386082A1

    公开(公告)日：2004-02-04

    申请号：EP02735222.8

    申请日：2002-04-04

    申请人： Leybold Vakuum GmbH

    发明人： BEYER, Christian ,  HODAPP, Josef ,  ENGLÄNDER, Heinrich

    IPC分类号： F04D29/66 ,  F16L55/04 ,  F16L27/12

    CPC分类号： F04D29/666 ,  F16C2360/45 ,  F16L27/11

    摘要： The invention relates to a vacuum conduit (10) which interlinks two vacuum devices (12, 14) and which comprises a vacuum-tight flexible tubular section (22) and a vibration damper (16) axially in parallel to said flexible tubular section (22). The vibration damper (16) is an actively controlled axial magnetic bearing, thereby providing a vibration damper with good damping properties. The vibration damper can be adapted by modifying the control parameters and is not subject to any mechanical wear. The contactless vibration damping prevents transmission of structure-borne noise.

    SCHWINGKOLBENPUMPE
    4.
    发明公开
    SCHWINGKOLBENPUMPE 审中-公开
    摇摆活塞泵

    公开(公告)号：EP1274938A1

    公开(公告)日：2003-01-15

    申请号：EP01902322.5

    申请日：2001-01-16

    申请人： Leybold Vakuum GmbH

    发明人： BEYER, Christian ,  BOY, Hermann ,  BAHNEN, Rudolf ,  SCHÖNBORN, Frank

    IPC分类号： F04B35/04 ,  F04B35/06 ,  F04B41/06

    CPC分类号： F04B35/045 ,  F04B35/06 ,  F04B41/06

    摘要： The invention relates to an oscillating piston pump (1), in particular to an oscillating piston vacuum pump. The invention aims to create a range of pumps of this type comprising members which exhibit a different final pressure behaviour and/or a different vacuum capability. To achieve this, the range consists of several identically constructed modules (2) of an oscillating piston pump that are connected in parallel and/or in series, according to customer requirements and each module is equipped with an oscillating piston drive.

    REIBUNGSVAKUUMPUMPE MIT PUMPAKTIVEN ELEMENTEN
    5.
    发明公开
    REIBUNGSVAKUUMPUMPE MIT PUMPAKTIVEN ELEMENTEN 审中-公开
    摩擦真空泵泵活性元素

    公开(公告)号：EP1200739A1

    公开(公告)日：2002-05-02

    申请号：EP00956198.6

    申请日：2000-07-18

    申请人： Leybold Vakuum GmbH

    发明人： BEYER, Christian ,  ADAMIETZ, Ralf ,  SCHÜTZ, Günter

    IPC分类号： F04D19/04

    CPC分类号： F04D19/042 ,  F04D29/542

    摘要： The invention relates to a friction vacuum pump (1) with active pumping elements, projecting into the suction chamber (25) whereby the cross-section of said elements narrows in the direction of the pump outlet (23). Said elements are composed of a series of stator and rotor blades attached to ring surfaces which are oriented towards the suction chamber (25). In order to properties of the pump, the shape of at least one part of the ring surfaces is adapted to the narrowing cross-section of the suction chamber (25) which is used for pumping purposes.

    ROTORBEFESTIGUNG EINER REIBUNGSVAKUUMPUMPE
    6.
    发明公开
    ROTORBEFESTIGUNG EINER REIBUNGSVAKUUMPUMPE 审中-公开
    转子安装摩擦真空泵

    公开(公告)号：EP1165966A1

    公开(公告)日：2002-01-02

    申请号：EP00903590.8

    申请日：2000-01-20

    申请人： Leybold Vakuum GmbH

    发明人： SCHÜTZ, Günter ,  BEYER, Christian ,  ADAMIETZ, Ralf ,  HAAS, Dieter

    IPC分类号： F04D29/26 ,  F04D19/04

    CPC分类号： F04D19/04 ,  F04D29/266

    摘要： The invention relates to a friction vacuum pump (1), in particular, to a turbomolecular vacuum pump, comprising a housing (2), with a shaft (15) which is supported in the housing (2) by bearings (16) and with a rotor (4) which has a central borehole (21) and which is mounted onto the shaft (15) in the area of said borehole (21). In order to reduce the risk of the joint area between the rotor and shaft becoming loose, the invention is characterised in that a ring groove (26, 31) which encompasses the joint area between the rotor (4) and the shaft (15) is provided in the area of at least one of the two front faces of said rotor (4).

    MAGNETLAGERUNG MIT DÄMPFUNG
    9.
    发明公开
    MAGNETLAGERUNG MIT DÄMPFUNG 审中-公开
    与损耗磁存储

    公开(公告)号：EP1280997A2

    公开(公告)日：2003-02-05

    申请号：EP01936224.3

    申请日：2001-04-11

    申请人： Leybold Vakuum GmbH

    发明人： BEYER, Christian ,  ENGLÄNDER, Heinrich ,  HODAPP, Josef

    IPC分类号： F04D29/04

    CPC分类号： F16C32/047 ,  F04D19/042 ,  F04D19/048 ,  F04D29/058 ,  F16C32/0425 ,  F16C32/0436 ,  F16C32/0478 ,  F16C2360/45

    摘要： The invention relates to a magnetic bearing for rapidly rotating machines (1), in particular, for turbo compressors, drag vacuum pumps, or similar, comprising two bearings (3, 4), each with a stator magnetic-ring set (5, 7) and a rotor magnetic-ring set (6, 8) and means (31) for damping the rotor movement, preferably in a radial direction. According to the invention, the damping agent may be simplified, whereby the magnetic bearing (3, 4) consists of magnetic-ring sets (5, 6; 7, 8) arranged concentrically to each other, in which the fixed magnetic-ring set (5 or 7) is arranged externally and the rotating magnetic-ring set (6 or 8) is arranged internally and the damping agent (32, 54, 55) is connected to the outer circumference surfaces of at least one part of the magnetic ring of each of the stator-side magnetic-ring sets (5, 7) and is made from a non-magnetic, material with good electrical conducting properties.