-
公开(公告)号:EP0651233B1
公开(公告)日:1998-12-16
申请号:EP94307396.5
申请日:1994-10-10
CPC分类号: H01J31/507 , G01J1/429 , G01S3/782 , G01T1/2957 , H01J31/49 , H01J2231/50021 , H01J2231/50068
公开(公告)号:EP0651233B1
公开(公告)日:1998-12-16
申请号:EP94307396.5
申请日:1994-10-10
CPC分类号: H01J31/507 , G01J1/429 , G01S3/782 , G01T1/2957 , H01J31/49 , H01J2231/50021 , H01J2231/50068