公开(公告)号：EP1150320A4

公开(公告)日：2007-08-01

申请号：EP00969846

申请日：2000-10-18

申请人： MATSUSHITA ELECTRIC IND CO LTD

发明人： ASIDA HIDEKI ,  FUJIWARA SHINYA ,  MARUNAKA HIDEKI ,  NAKAGAWA TADASHI ,  SUMIDA KEISUKE ,  YASUI HIDEAKI ,  SUGIMOTO KAZUHIKO ,  TANAKA HIROYOSI

IPC分类号： H01J9/02 ,  H01J17/49 ,  H01J11/02

CPC分类号： H01J11/24 ,  H01J9/02 ,  H01J11/12 ,  H01J11/26 ,  H01J2211/225 ,  H01J2211/245 ,  H01J2211/265

摘要： A method of manufacturing a metal electrode which can remove an edge curl substantially to an extent that an edge curl has no influence when a metal electrode such as a bus electrode or a data electrode constituting a Display panel such as a PDP, is patterned by photolithography. The manufacturing method includes a drying step in which flows (F1, F2 and F3) of solvent from a solvent high content region and a solvent high absorption capacity region to a solvent low content region are produced.