PARTIALLY INSULATED CATHODE
    4.
    发明公开
    PARTIALLY INSULATED CATHODE 审中-公开
    电报ISOLIERTE KATHODE

    公开(公告)号:EP2985568A1

    公开(公告)日:2016-02-17

    申请号:EP15179548.1

    申请日:2015-08-03

    CPC classification number: H01J1/025 G01C19/665 H01J9/02 H01J17/06 H01J17/16

    Abstract: A partially-insulated cathode for exciting plasma in a plasma chamber is provided. The partially-insulated cathode includes a conductive structure enclosing a cavity having a cavity surface and an insulating material contiguously covering a portion of the cavity surface from the cavity opening up to an insulation height that is less than a cavity height. Cross-sections of the cavity in X-Y planes have at least one respective cavity-width. A cavity opening has a diameter less than a minimum cavity-width of the at least one cavity-width.

    Abstract translation: 提供了用于激发等离子体室中的等离子体的部分绝缘阴极。 部分绝缘的阴极包括封闭具有空腔表面的空腔的导电结构和连续地覆盖空腔表面的从空腔开口的一部分到绝缘高度小于空腔高度的绝缘材料。 在X-Y平面中的空腔的横截面具有至少一个相应的腔宽度。 空腔开口具有小于至少一个腔宽度的最小腔宽度的直径。

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